레이저에 의해 생성된 Si 박막의 주기적 표면 구조에서의 도파모드 공진연구
Guided-mode Resonances in Periodic Surface Structures Induced on Si Thin Film by a Laser
0
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
본 연구에서는 355 nm 파장의 나노초 레이저를 비정질 실리콘(amorphous-Si, a-Si) 박막에 조사하여 형성된 주기적 laser inducedperiodic surface structure (LIPSS) 구조의 분광학적 특성을 연구하였다. 지름 196 mm 의 가우시안 빔을 단위면적당 레이저 펄스 190–280회, 레이저 빔의 세기는 100–130 mJ/cm 2 범위에서 ‘ㄹ’ 자 형태로 2차원 스캔하였다. 그 결과 Si 박막 표면에 ~300 nm 주기의 LIPSS 구조가 레이저 편광에 수직 방향으로 정렬되었다. 시료의 투과율 스펙트럼 측정하여 transverse-electric (TE), transverse-magnetic (TM) 편광에 대해서 각각 700 nm, 500 nm 근방에서 dip이 관측되었다. 이 현상을 설명하기 위해 1차원 격자구조 모델을 이용하여 rigorous coupled wave analysis (RCWA)를 이용한 시뮬레이션을 하여 편광에 따른 도파모드 공진(guided-mode resonance)에 의한 특성임을 규명하였다.
Abstract
We examine the spectral characteristics of laser-induced periodic surface structures (LIPSSs) formed on an amorphous silicon (a-Si) film irradiated by a 355-nm nanosecond laser. A Gaussian beam with a diameter of 196 μm is used to perform a two-dimensional raster scan. The laser’s pulse number is varied from 190 to 280, and its intensity is adjusted between 100 mJ/cm 2 to 130 mJ/cm 2 . LIPSSs with a periodicity of approximately 330 nmform on the surface of the Si film, aligned perpendicular to the laser’s polarization. Transmission spectra of the samples show dips around 700 nmfor transverse electric (TE) polarization and around 500 nm for transverse magnetic (TM) polarization. The features are investigated with a one-dimensional-grating model using a rigorous coupled-wave analysis (RCWA). Simulations confirm that the observed dips are due to the resonantmodes, depending on the polarization.
참고문헌 (19)
- J. Bonse, "Laser-induced periodic surface structures —A scientific evergreen", IEEE J. Sel. Top. Quantum Electron, 23, pp.9000615~ (2017)
- H. M. van Driel, "Laser-induced periodic surface structure on solids : A universal phenomenon", Phys. Rev. Lett, 49, pp.1955~1958 (1982)
- A. Siegman, "Stimulated Wood’s anomalies on laser-illuminated surfaces", IEEE J. Quantum Electron, 22, pp.1384~1403 (1986)
- S. Höhm, "Area dependence of femtosecond laser-induced periodic surface structures for varying band gap materials after double pulse excitation", Appl. Surf. Sci, 278, pp.7~12 (2013)
- M. Huang, "Origin of laser-induced near-subwavelength ripples : Interference between surface plasmons and incident laser", ACS Nano, 3, pp.4062~4070 (2009)
- J. Bonse, "Pulse number dependence of laserinduced periodic surface structures for femtosecond laser irradiation of silicon", J. Appl. Phys, 108, pp.034903~ (2010)
- O. Varlamova, "Influence of irradiation dose on laser-induced surface nanostructures on silicon", Appl. Surf. Sci, 278, pp.62~66 (2013)
- T. S. Park, "Order-disorder control of Si nanoparticles in laserirradiated amorphous-Si thin film", Opt. Mater, 133, pp.112956~ (2022)
- P. C. van der Wilt, "Excimer-laser annealing : Microstructure evolution and a novel characterization technique", SID Symp. Dig. Tech. Pap, 45, pp.149~152 (2014)
- C. W. Kim, "LTPS backplane technologies for AMLCDs and AMOLEDs", SID Symp. Dig. Tech. Pap, 42, pp.862~865 (2011)
- M. J. Kang, "Scan-path dependence of surface ripples on Si thin films induced by laser irradiation with an asymmetric Gaussian beam", Opt. Laser Technol, 146, pp.107550~ (2022)
- M. Kim, "Guided-mode resonance in periodic surface textures on Si thin films induced by nanosecond laser irradiation", Photonics Nanostruct. : Fundam. Appl, 45, pp.100923~ (2021)
- M. Kang, "Enhancement of ultra-violet light absorption of surface-textured silicon induced by nanosecond laser irradiations", Appl. Surf. Sci, 530, pp.147260~ (2020)
- E. S. Hwang, "Resonance colors in an amorphous-Si thin layer irradiated by an ultraviolet nanosecond laser", AIP Adv, 12, pp.065323~ (2022)
- A. Dostovalov, "Hierarchical anti-reflective laser-induced periodic surface structures(LIPSSs)on amorphous Si films for sensing application", Nanoscale, 12, pp.13431~13441 (2020)
- M. G. Moharam, "Rigorous coupled-wave analysis of planar-grating diffraction", J. Opt. Soc. Am, 71, pp.811~818 (1981)
- E. D. Palik, "Handbook of Optical Constants of Solids, Vol. 1" (1985), Academic Press
- N. Choi, "Evaluation of polycrystalline silicon after Excimer laser annealing by Retardation measurement method", SID Symp. Dig. Tech. Pap, 50, pp.885~887 (2019)
- L. Hong, "Crystallization and surface texturing of amorphous-Si induced by UV laser for photovoltaic application", J. Appl. Phys, 111, pp.043106~ (2012)