나노패턴 소프트 패드 적용 OLED 진공로봇 핸드유닛의 글라스 처짐 및 동적 거동 특성 분석

Abstract

In the Flat Display Panel (FDP) manufacturing process, glass substrate transfer robots are generally classified into atmospheric and vacuum transfer systems. In OLED deposition processes, two glass substrates are often handled within the chamber to improve productivity; however, as the substrate size increases, slip and deflection become more significant during high-speed transfer. To mitigate these issues, both the structural stiffness of the vacuum robot hand unit and the frictional characteristics of the contact soft pad play critical roles. This study investigates the dynamic behavior and deformation characteristics of an OLED vacuum robot hand unit equipped with a nano-patterned soft pad. Linear nano-patterns with a linewidth of 300 nm, a pitch of 500 nm, and a height of 1–2 µm were fabricated on a silicone-based pad via electron-beam lithography, etching, and electroplating processes. Friction tests were conducted using block-type molded specimens to evaluate slip and friction behavior under varying loads and temperatures. Structural and dynamic finite element analyses were performed for an 8.5G half-size glass substrate and a 350 kg metal mask to assess the deflection and vibration characteristics of the vacuum hand unit. The results demonstrate that the nano-patterned soft pad enhances frictional stability at the interface between the hand unit and the glass substrate, effectively reducing slip and deflection during high-speed transfer. The proposed design methodology is expected to improve precision and reliability in OLED vacuum handling systems for large-area substrates.