정밀 정렬 검사를 이용한 대면적 CMOS 이미지 센서 모듈 구현
Implementation of Large Area CMOS Image Sensor Module using the Precision Align Inspection
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This paper describes a large area CMOS image sensor module Implementation usingthe precision align inspection program. This work is needed because wafer cutting system doesnot always have high precision. The program check more than 8 point of sensor edges and alignsensors with moving table. The size of a 2×1 butted CMOS image sensor module which exceptfor the size of PCB is 170 mm×170 mm. And the pixel size is 55 μm×55 μm and the number ofpixels is 3,072×3,072. The gap between the two CMOS image sensor module was arranged in lessthan one pixel size.
Abstract
This paper describes a large area CMOS image sensor module Implementation usingthe precision align inspection program. This work is needed because wafer cutting system doesnot always have high precision. The program check more than 8 point of sensor edges and alignsensors with moving table. The size of a 2×1 butted CMOS image sensor module which exceptfor the size of PCB is 170 mm×170 mm. And the pixel size is 55 μm×55 μm and the number ofpixels is 3,072×3,072. The gap between the two CMOS image sensor module was arranged in lessthan one pixel size.
참고문헌 (8)
- Bigas M, "Review of CMOS Image Sensors", Microelectron. J, 36, pp.433~451 (2006)
- Farrier M, "Very Large Area CMOS Active-Pixel Sensor for Digital Radiography", IEEE Trans. Electron Devices (2009)
- Heo SK, "12-inch-wafer-scale CMOS Active-Pixel Sensor for Digital Mammography", Proc. SPIE (2011)
- Korthout L, "A Wafer-scale CMOS APS Imager for Medical X-ray Applications", Proc. International Image Sensor Workshop (2009)
- Scheffer D., "A Wafer scale Active Pixel CMOS Image Sensor for generic X-ray Radiology", Proc. SPIE (2007)
- Turchetta R, "Large Area CMOS Image Sensors", JINST, 6(1), pp.C01099~ (2011)
- Status of the CMOS Image Sensor Industry, "Yole", ~ (2012)
- Yuichiro Y, "A 300 mm Wafer-Size CMOS Image Sensor with In-Pixel Voltage-Gain Amplifier and Column-Level Differential Readout Circuitry", IEEE International Solid-State Circuits Conference Digest of Technical Papers, pp.408~410 (2011)