나노 입자를 이용한 PCB 기반 후막 가스 센서
Thick film gas sensor based on PCB by using nano particles
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Abstract
This paper presented a low-cost thick film gas sensor module, which was based on simple PCB (Printed Circuit Board) process. The proposed sensor module included a NO2/H2 gas sensor, a relative humidity sensor, and a heating element. The NO2/H2 gas and relative humidity sensors were realized by screen-printing SnO2, BaTiO3 nano-powders on IDTs (Interdigital Transducer) of a PCB substrate, respectively. At first 1% H2 gas flowed into the sensor chamber. After 4 min, air filled the chamber while H2 gas flow stopped. This experiment was performed repeatedly. The identical procedure was used for the NO2 detection. The result for sensing H2 gas showed the increase of voltage from 0.8V to 3.5V due to the conductance increase and its reaction response time by hydrogen flow was 65 sec. NO2 sensing results showed 2.7 V voltage drop due to the conductance decrease and its response time was 3 sec through a voltage monitoring.
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