반도체 제조 설비용 전해 연마된 STS316L 용접강관의 표면 성질-전해 조건과 표면 성상의 관계를 중심으로-

Abstract

316L stainless steel welding tube was electrolytically polished and the inner surface characteristics of the tube were tested. Electro-polishing variables such as current, voltage, concentration of electrolyte and electro-polishing time were changed to seek for optimum condition. These makes a optimum conditions for the electro-polishing as 4000A, 9V, 1.7 specific gravity of electrolyte, and 30 minute of electro-polishing time. It makes the surface roughness as Ra < 0.25mm. XPS test resulted as the ratio of CrO/FeO equals or more to 3/1. AES test resulted as the thickness of CrO film of 38. DTA test resulted as the tube did not react with N₂, H₂, and O₂ gas below 1073K. As summarize above results, the electro- polished 316L stainless steel welding tube satisfied the conditions to apply as a pipeline for semi- conductor production facility and clean room.