RF 마그네트론 스퍼터링법으로 증착한 태양전지용 GZO/ITO 투명전도성 박막의 물성에 미치는 ITO층의 영향
Effect of ITO Layer on Electrical and Optical Properties of GZO/ITO Double-layered TCO Films Deposited by RF Magnetron Sputtering for Application to Solar Cells
2
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
GZO/ITO double layered films were deposited on unheated non-alkali glass substrates by RF magnetron sputtering using an ITO (SnO_2: 10 wt%) and GZO(Ga_2O_3: 5.57 wt%) ceramic targets, respectively. The electrical resistivity of GZO/ITO films depends on the thickness ratio between the GZO film and ITO film. With increasing ITO film thickness, the resistivity of GZO/ITO films decreased which due to large increase in the Hall mobility. Also, the crystallinity of GZO/ITO film was improved with an increase in ITO thickness which was evaluated by X-ray diffraction. The average transmittance of the films was more than 85% in the visible region, which is slightly higher than ITO single layer films.
Abstract
GZO/ITO double layered films were deposited on unheated non-alkali glass substrates by RF magnetron sputtering using an ITO (SnO_2: 10 wt%) and GZO(Ga_2O_3: 5.57 wt%) ceramic targets, respectively. The electrical resistivity of GZO/ITO films depends on the thickness ratio between the GZO film and ITO film. With increasing ITO film thickness, the resistivity of GZO/ITO films decreased which due to large increase in the Hall mobility. Also, the crystallinity of GZO/ITO film was improved with an increase in ITO thickness which was evaluated by X-ray diffraction. The average transmittance of the films was more than 85% in the visible region, which is slightly higher than ITO single layer films.
참고문헌 (15)
- 김규호, "R.F Sputtering 법으로 증착한 ITO 박막의 미세구조와 전기.광학적 특성", 한국표면공학회지, 38(4), pp.150~155 (2005), 한국표면공학회
- Z. C. Jin, , Thin Solid Films, 64, pp.381~ (1988)
- 문진욱, "RF", DC 동시인가 마그네트론 스퍼터링 방법으로 증착된 ITO박막의 열처리 특성 연구, 2007, pp.40(3), 117~124[DOI]
- D. R. Sahu, , Microelectron. J, 38, pp.299~ (2007)
- 박이섭, "DC마그네트론 스퍼터링에 의해 증착한 AZO박막의 특성", 한국표면공학회지, 40(3), pp.107~112 (2007), 한국표면공학회
- S. J. Henley, , Surf. Coat. Technol, 177, pp.271~ (2004)
- C. S. Hong, , Thin Solid Films, 515(3), pp.957~ (2006)
- S. I. Kim, , Thin Solid Films, 518, pp.3085~ (2010)
- Se Hun Park, "Characteristics of Al-doped, Ga-doped and In-doped zinc-oxide films as transparent conducting electrodes in organic light-emitting diodes", Current Applied Physics, 10(3), pp.488~490 (2010), 한국물리학회
- S. Y. Ryu, , Applied Physics Letters, 92, pp.23306~ (2008)
- X. W. Sun, , Thin Solid Films, 360, pp.75~ (2000)
- N. Fujimura, , J. Crystal Growth, 130, pp.269~ (1993)
- 박상은, "DC 마그네트론 스터링법을 이용하여 증착한 Ga, Al, In 첨가 ZnO 박막의 특성", 한국표면공학회지, 41(4), pp.142~146 (2008), 한국표면공학회
- C. H. Yi, , Jpn. J. Appl. Phys, 34, pp.1639~ (1995)
- R. Vinodkumar, , Solar Energy Materials & Solar Cells, 94, pp.68~ (2010)