RF 마그네트론 스퍼터링 법으로 제작한 ITZO 박막의 구조 및 광학적 특성
Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering
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Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from 100oC to 400oC. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at 200oC. The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at 200oC all substrates temperature.
Abstract
Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from 100oC to 400oC. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at 200oC. The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at 200oC all substrates temperature.
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