본문 바로가기
KERD
논문KCI 등재

Syntheses and Properties of Quaternary Cr-Ti-B-N Coatings by a High Power Impulse Magnetron Sputtering Technique

0

조회

0

다운로드

0

인용

0

참고문헌

키워드

주제분류기계공학

초록

Cr-Ti-B-N coatings were synthesized by a hybrid coating system combining high power impulse magnetron sputtering (HIPIMS) and DC pulse magnetron sputtering from a TiB2 and a Cr target in argon-nitrogen environment,respectively. By changing the power applied on the Cr and TiB2 cathodes, the Cr-Ti-B-N coatings with various Ti/Cr ratio and B content were deposited. The phase structure, microstructure and chemical compositions of the Cr-Ti-B-N coatings were studied by X-ray diffraction (XRD), transmission scanning electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS). With increase of Cr element in the coatings, the nanocomposite microstructure consisting of nano-sized (Cr, Ti) N crystallites and amorphous BN phase were obtained in the coatings. The microhardness of the Cr-Ti-B-N coatings exhibited a peak value of ~41 GPa for the CrTi0.1B0.4N1.3, and then decreased with further increase of Cr content in the coatings,and all the coatings exhibited low friction coefficient. The oxidation and corrosion behavior of th

Abstract

Cr-Ti-B-N coatings were synthesized by a hybrid coating system combining high power impulse magnetron sputtering (HIPIMS) and DC pulse magnetron sputtering from a TiB2 and a Cr target in argon-nitrogen environment,respectively. By changing the power applied on the Cr and TiB2 cathodes, the Cr-Ti-B-N coatings with various Ti/Cr ratio and B content were deposited. The phase structure, microstructure and chemical compositions of the Cr-Ti-B-N coatings were studied by X-ray diffraction (XRD), transmission scanning electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS). With increase of Cr element in the coatings, the nanocomposite microstructure consisting of nano-sized (Cr, Ti) N crystallites and amorphous BN phase were obtained in the coatings. The microhardness of the Cr-Ti-B-N coatings exhibited a peak value of ~41 GPa for the CrTi0.1B0.4N1.3, and then decreased with further increase of Cr content in the coatings,and all the coatings exhibited low friction coefficient. The oxidation and corrosion behavior of th

참고문헌 (34)

  1. S. A. Barnett, , Physics World, 11, pp.45~ (1998)
  2. S. Veprek, , Surf. Coat. Technol., 133, pp.152~ (2000)
  3. K. W. Lee, , Surf. Coat. Technol., 177, pp.591~ (2004)
  4. D. V. Shtansky, , Thin Solid Films, 330, pp.420~421 (2002)
  5. D. V. Shtansky, , Phys. Solid State, 47, pp.252~ (2005)
  6. M. Audronis, , Surf. Coat. Technol., 200, pp.1366~ (2005)
  7. R. J. Brotherton, "Progress in Boron Chemistry, vol.2", pp.173~ (1970), Pergamon Press
  8. C. Mitterer, , Surf. Coat. Technol., 41, pp.351~ (1990)
  9. M. Tamura, , Surf. Coat. Technol., 54, pp.255~260 (1992)
  10. E. Broszeit, , Surf. Coat. Technol., 58, pp.29~ (1993)
  11. W. Gissler, , Surf. Coat. Technol., 68, pp.556~ (1994)
  12. H. Karner, , Surf. Coat. Technol., 39, pp.263~ (1991)
  13. J. M. Antunes, , Surf. Coat. Technol., 140, pp.27~ (2002)
  14. C. Mitterer, , J. Solid State Chem., 133, pp.279~291 (1997)
  15. B. Rother, , Surf. Coat. Technol., 73, pp.14~ (1995)
  16. B. Rother, , Surf. Coat. Technol., 96, pp.163~ (1997)
  17. S. M. Aouadi, , J. Appl. Phys., 91, pp.1040~ (2002)
  18. P. V. Kiryukhantsev-Korneev, , Thin Solid Films, 517, pp.2675~2680 (2009)
  19. J. Lin, , Surf. Coat. Technol., 203, pp.588~593 (2008)
  20. D. V. Shtansky, , Surf. Coat. Technol., 200, pp.208~212 (2005)
  21. D. V. Shtansky, , Surf. Coat. Technol., 202, pp.861~865 (2007)
  22. J. Paulitsch, , Thin Solid Films, 518, pp.5558~5564 (2010)
  23. J. L. Lin, , Surf. Coat. Technol., 206, pp.3283~3290 (2012)
  24. J. L. Lin, , Surf. Coat. Technol., 206, pp.2474~2483 (2012)
  25. J. L. Lin, , Surf. Coat. Technol., 205, pp.3226~3234 (2011)
  26. J. Paulitsch, , Thin Solid Films, 517, pp.1239~1244 (2008)
  27. O. Nishimura, , J. Electron Spectrosc. Relat. Phemon., 49, pp.335~ (1989)
  28. R. Merryfield, , Catal., 77, pp.348~ (1982)
  29. Y. M. Shulg'a, , Khimii, 21, pp.2621~ (1976)
  30. W. E. Slinkard, , J. Catal., 68, pp.423~ (1981)
  31. M. Romand, , Analusis, 4, pp.309~ (1976)
  32. B. M. Biwer, , J. Electron Spectrosc. Relat. Phemon., 40, pp.339~ (1986)
  33. K. Hamrin, , Phys. Scripta, 1, pp.277~ (1970)
  34. G. Rocchini, , Corros. Sci., 37(6), pp.987~1003 (1995)

관련 논문AI추천

이 간행물의 다른 논문 (9건)