하이브리드 코팅 시스템에 의해 합성된 Zr-Al-N 박막의 미세구조와 기계적 특성, 산화 특성, 부식특성
Microstructure, Mechanical, Oxidation and Corrosion Properties of Zr-Al-N Coatings Synthesized by the Hybrid Coating System
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Zr-Al-N coatings were synthesized by the hybrid coating system combining arc ion plating and DC magnetronsputtering from a Zr and an Al target in argon-nitrogen atmosphere, respectively. By changing the powerapplied on the Al cathodes, the Zr-Al-N coatings with various Al contents were deposited. The microstructureand chemical compositions of the Zr-Al-N coatings were studied by X-ray diffraction (XRD), high-resolutiontransmission electron microscopy (HRTEM). With increasing of Al content in the coatings, the solid solution(Zr, Al)N crystallites were observed in the Zr-Al-N coatings. The nanohardness of the Zr-Al-N coatings exhibiteda maximum value of 42 GPa for the Zr-Al (7.9 at.%)-N, and decreased with further increase in Alcontent in the coatings. The oxidation and corrosion behavior of the Zr-Al-N coatings revealed better propertiescompared than those of ZrN coatings due to the formation of a solid solution.
Abstract
Zr-Al-N coatings were synthesized by the hybrid coating system combining arc ion plating and DC magnetron sputtering from a Zr and an Al target in argon-nitrogen atmosphere, respectively. By changing the power applied on the Al cathodes, the Zr-Al-N coatings with various Al contents were deposited. The microstructure and chemical compositions of the Zr-Al-N coatings were studied by X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM). With increasing of Al content in the coatings, the solid solution (Zr, Al)N crystallites were observed in the Zr-Al-N coatings. The nanohardness of the Zr-Al-N coatings exhibited a maximum value of 42 GPa for the Zr-Al (7.9 at.%)-N, and decreased with further increase in Al content in the coatings. The oxidation and corrosion behavior of the Zr-Al-N coatings revealed better properties compared than those of ZrN coatings due to the formation of a solid solution
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