Enhancement of Surface Diffusivity for Waviness Evolution on Heteroepitaxial Thin Films
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The present study deals with a numerical analysis on the island growth of heteroepitaxial thin-films through local surface diffusivity enhancement. A non-linear governing equation for the surface waviness evolution in lattice-mismatched material systems is developed for the case of spatially-varying surface diffusivity. Results show that a flat film that is stable under constant diffusivity conditions evolves to form nanostructures upon externally-induced spatial diffusivity modulation. The periodicity of waviness can be controlled by changing the modulation parameters, which allows for generation of pattern arrays. The present study therefore points towards a post-deposition treatment technique that achieves controllability and order in the structure formation process for applications in nanoelectronics and thin-film devices.
Abstract
The present study deals with a numerical analysis on the island growth of heteroepitaxial thin-films through local surface diffusivity enhancement. A non-linear governing equation for the surface waviness evolution in lattice-mismatched material systems is developed for the case of spatially-varying surface diffusivity. Results show that a flat film that is stable under constant diffusivity conditions evolves to form nanostructures upon externally-induced spatial diffusivity modulation. The periodicity of waviness can be controlled by changing the modulation parameters, which allows for generation of pattern arrays. The present study therefore points towards a post-deposition treatment technique that achieves controllability and order in the structure formation process for applications in nanoelectronics and thin-film devices.
참고문헌 (19)
- I. N. Stranski, , Sitzungsber. Akad. Wiss. Wien, Math.-Naturwiss. Kl. Abt. 2B, 146, pp.797~ (1938)
- S. Oda, "Silicon nanoelectronics" (2006), CRC Press
- T. Markvart, "Solar Cells: Materials, Manufacture and Operation" (2005), Elsevier
- G. Wei, , Nano Letters, 7, pp.218~ (2007)
- K. A. Sablon, , J. Appl. Phys, 108, pp.074305~ (2010)
- T. Sugaya, , Appl. Phys. Lett, 97, pp.183104~ (2010)
- Y. Okada, , J. Appl. Phys, 109, pp.024301~ (2011)
- T. Sugaya, , Solar Energy Mater. Solar Cells, 95, pp.163~ (2011)
- Q. Deng, , Physica B, 406, pp.73~ (2011)
- S. J. Koh, , Nanoscale Res. Lett, 2, pp.519~ (2007)
- C. Dais, , Appl. Phys. Lett, 92, pp.143102~ (2008)
- R. Nötzel, , IEEE J. Sel. Top. Quant. Electron, 14, pp.1140~ (2008)
- H. Gao, , Annu. Rev. Mater. Sci, 29, pp.173~ (1999)
- L. B. Freund, , Int. J. Solids Structures, 32, pp.911~ (1995)
- W. T. Tekalign, , J. Appl. Phys, 96, pp.5505~ (2004)
- B. J. Spencer, , Phys. Rev. B, 59, pp.2011~ (1999)
- W. T. Tekalign, , J. Appl. Phys, 102, pp.073503~ (2007)
- Y. Y. Kim, , Appl. Phys. Lett, 96, pp.123116~ (2010)
- C. Zhang, , Appl. Phys. Lett, 83, pp.4827~ (2003)