상분리 다공 구조 형성에 대한 3차원적 컴퓨터 모델링
3D Computer Modeling on Phase Separated Porous Structure
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초록
We developed a 3D simulation model of microstructure evolution of vertically aligned porous structure due to phase separation during film growth. The model proves its validity by reproducing the results of previous researches which are topological features of the microstructures and effects of varied processing parameters. The model will be extended by including bulk diffusion effect and elastic effect.
Abstract
We developed a 3D simulation model of microstructure evolution of vertically aligned porous structure due to phase separation during film growth. The model proves its validity by reproducing the results of previous researches which are topological features of the microstructures and effects of varied processing parameters. The model will be extended by including bulk diffusion effect and elastic effect.
참고문헌 (13)
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