DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 제작된 CrN 코팅막의 물성 비교연구
A Comparative Study of CrN Coatings Deposited by DC and Asymmetric Bipolar Pulsed DC Sputtering
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초록
The purpose of this comparative study was to investigate the properties of chromium nitride coatings deposited by asymmetric bipolar pulsed DC sputtering and DC sputtering system. Oscilloscope traces of the I-V waveforms indicate high power and high current density outputs during the asymmetric bipolar pulsed mode. The grain size decreases with decreasing duty cycle. The duty cycle has a strong influence not only on the microstructural properties but also on the mechanical properties of chromium nitride coatings. Comparing with the continuous DC sputtering, the chromium nitride coatings prepared by pulsed DC asymmetric bipolar processalso exhibit better surface roughness.
Abstract
The purpose of this comparative study was to investigate the properties of chromium nitride coatings deposited by asymmetric bipolar pulsed DC sputtering and DC sputtering system. Oscilloscope traces of the I-V waveforms indicate high power and high current density outputs during the asymmetric bipolar pulsed mode. The grain size decreases with decreasing duty cycle. The duty cycle has a strong influence not only on the microstructural properties but also on the mechanical properties of chromium nitride coatings. Comparing with the continuous DC sputtering, the chromium nitride coatings prepared by pulsed DC asymmetric bipolar processalso exhibit better surface roughness.
참고문헌 (19)
- G. A. Zhang, , Mater. Sci. Eng, A 460-461, pp.301~ (2007)
- E. Forniés, , Surf. Coat. Tech, 200, pp.6047~ (2006)
- C. W. Zou, , Vacuum, 83, pp.1086~ (2009)
- J. Lin, , Surf. Coat. Tech, 206, pp.2474~ (2012)
- 김민석, "알루미늄 압출용 금형의 내마모성향상을 위한 TiN, CrN 코팅", 한국표면공학회지, 42(6), pp.272~275 (2009), 한국표면공학회
- 박정민, "CrN과 TiN 코팅을 적용한 증기 발생기 세관의 프레팅 마모에 대한 연구", 한국윤활학회지, 24(5), pp.250~254 (2008), 한국윤활학회
- 전성용, "DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 증착된 TiN 코팅막의 물성 비교연구", 한국표면공학회지, 44(5), pp.179~184 (2011), 한국표면공학회
- 고형덕, "펄스 DC 마그네트론 스퍼터링법에 의한 ZnO:Al 박막 증착시 펄스 주파수의 영향", 한국세라믹학회지, 41(6), pp.10~10 (2004), 한국세라믹학회
- J. H. Kim, , J. Kor. Ceram. Soc, 38(1), pp.61~ (2001)
- J. S. Cherng, , Vacuum, 84, pp.653~ (2010)
- J. W. Lee, , J. Elec. Mater, 34, pp.1484~ (2005)
- B. D. Cullity, "Element of X-ray Diffraction", pp.167~ (2001), Prentice-Hall Inc.
- S. Schiller, , Surf. Coat. Tech, 61, pp.331~ (1993)
- Harish C. Barshilia, , Vacuum, 83, pp.427~ (2009)
- I. Petrov, , J. Vac. Sci. Tech, A 21, pp.774~ (2003)
- J. Lin, , Thin Solid Films, 517, pp.1887~ (2009)
- I. Petrov, , Thin Solid Films, 169, pp.299~ (1989)
- Harish C. Barshilia, , Surf. Coat. Tech, 201, pp.1827~ (2006)
- 김성원, "나노인덴테이션으로 측정한 Ti(C0.7N0.3)-WC-Ni 써멧 구성상의 경도", 한국세라믹학회지, 46(1), pp.116~121 (2009), 한국세라믹학회