DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 증착된 NbN 코팅막의 물성 비교연구
A Comparative Study of NbN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Magnetron Sputtering
0
조회
0
다운로드
1
인용
0
참고문헌
키워드
초록
The paper presents the comparative results of NbN coatings deposited by DC and pulsed DC asymmetric bipolar magnetron sputtering systems. The results show that, with the decreasing duty cycle and increasing pulse frequency, the coating morphology changes from a columnar to a dense structure, with finer grains. The Pulsed sputtered NbN coatings showed higher hardness, higher residual stress, and smaller grain sizes than those of DC prepared NbN coatings. Moreover residual stress of pulsed sputtered NbN coatings increased on increasing pulse frequency. Meanwhile, the surface roughness decreased continuously with increasing pulsed DC frequency up to 50 kHz.
Abstract
The paper presents the comparative results of NbN coatings deposited by DC and pulsed DC asymmetric bipolar magnetron sputtering systems. The results show that, with the decreasing duty cycle and increasing pulse frequency, the coating morphology changes from a columnar to a dense structure, with finer grains. The Pulsed sputtered NbN coatings showed higher hardness, higher residual stress, and smaller grain sizes than those of DC prepared NbN coatings. Moreover residual stress of pulsed sputtered NbN coatings increased on increasing pulse frequency. Meanwhile, the surface roughness decreased continuously with increasing pulsed DC frequency up to 50 kHz.
참고문헌 (22)
- 전성용, "DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 제작된 CrN 코팅막의 물성 비교연구", 한국표면공학회지, 47(2), pp.86~92 (2014), 한국표면공학회[DOI]
- 전성용, "DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 증착된 TiAlN 코팅막의 물성 비교연구", 한국표면공학회지, 47(4), pp.168~173 (2014), 한국표면공학회[DOI]
- 이수영, "마그네슘 압출용 금형의 내마모성 향상을 위한 CrN, TiN 코팅", 한국표면공학회지, 44(6), pp.233~238 (2011), 한국표면공학회
- M. A. Mamun, , Appl. Surf. Sci, 258, pp.4308~ (2012)
- V. N. Zhitomirskyae, , Appl. Surf. Sci, 258, pp.4308~ (2012)
- S. Y. Yoon, , K. H. Kim Kor. Inst. Surf. Eng, 35, pp.199~ (2002)
- K. Baba, , Nucl. Instru. Meth. Phys. Res. B, 127, pp.128 (1997), 841~
- R. D. Arnell, , Surf. Coat. Technol, 112, pp.170~ (1999)
- S. Y. Tan, , Thin Solid Films, 519, pp.2116~ (2011)
- R. D. Arnell, , Surf. Coat. Tech, 188–189, pp.158~ (2004)
- H. C. Barshilia, , Surf. Coat. Tech, 201, pp.1827~ (2006)
- 전신희, "Characteristics of NbN Films Deposited on AISI 304 Using Inductively Coupled Plasma Assisted DC Magnetron Sputtering Method", 한국표면공학회지, 46(5), pp.187~191 (2013), 한국표면공학회[DOI]
- E. Arslan, , Surf. Eng, 26, pp.615~ (2010)
- S. Y. Chun, , J. Kor. Inst. Surf. Eng, 47, pp.100~ (2014)
- I. Petrov, , J. Vac. Sci. Tech. A, 21, pp.774~ (2003)
- N. Maazi, , Growth, 243, pp.361~ (2002)
- H. C. Barshilia, , Vacuum, 83, pp.427~ (2009)
- M. Ahlgren, , Surf. Coat. Tech, 200, pp.157~ (2005)
- I. Petrov, , Thin Solid Films, 169, pp.299~ (1989)
- L. Hultman, , J. Appl. Phys, 61, pp.552~ (1987)
- J. M. Lee, , Trans. Nonferrous Met. Soc. China, 22, pp.585~ (2012)
- 김성원, "나노인덴테이션으로 측정한 Ti(C0.7N0.3)-WC-Ni 써멧 구성상의 경도", 한국세라믹학회지, 46(1), pp.116~121 (2009), 한국세라믹학회