SiNx와 금속막을 이용한 플렉시블 OLED 봉지 방법
Encapsulation Method of Flexible OLED Using SiNx and Metal Film
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The encapsulation method of flexible organic light emitting devices (OLEDs) was investigated for thestructure of ITO / 2-TNATA / NPB / Alq3 : Rubrene (1 vol.%) / Alq3 / LiF / Al / Alq3 / LiF / Al (OLED#1), on which SiNx thin film was deposited and metal film was attached to protect the damage of OLEDfrom oxygen and moisture. The SiNx thin film was deposited by plasma enhanced chemical vapor deposition(PECVD) method using SiH4 of 20 sccm and N2 of 15~35 sccm as reactor gases. The optimum SiNx depositioncondition was found to be 20 sccm SiH4 and 20 sccm N2 from the Ca test of the fabricated SiNx thin film. The life time of OLED #1, OLED #1 / SiNx 200 nm, OLED #1 / SiNx 400 nm and OLED #1 / SiNx 400 nm/ metal film was 7, 12, 25, and 45 hours, respectively. In conclusion, it has been shown that the lifetimeof OLEDs can be improved more than 6 times by SiNx film and a metal film encapsulation.
Abstract
The encapsulation method of flexible organic light emitting devices (OLEDs) was investigated for thestructure of ITO / 2-TNATA / NPB / Alq3 : Rubrene (1 vol.%) / Alq3 / LiF / Al / Alq3 / LiF / Al (OLED#1), on which SiNx thin film was deposited and metal film was attached to protect the damage of OLEDfrom oxygen and moisture. The SiNx thin film was deposited by plasma enhanced chemical vapor deposition(PECVD) method using SiH4 of 20 sccm and N2 of 15~35 sccm as reactor gases. The optimum SiNx depositioncondition was found to be 20 sccm SiH4 and 20 sccm N2 from the Ca test of the fabricated SiNx thin film. The life time of OLED #1, OLED #1 / SiNx 200 nm, OLED #1 / SiNx 400 nm and OLED #1 / SiNx 400 nm/ metal film was 7, 12, 25, and 45 hours, respectively. In conclusion, it has been shown that the lifetimeof OLEDs can be improved more than 6 times by SiNx film and a metal film encapsulation.
참고문헌 (6)
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