하이브리드 공정으로 제조한 TiAlSiN 박막의 특성
Mechanical Properties of TiAlSiN films Coated by Hybrid Process
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In this study, TiAlSiN coatings have been successfully synthesized on stainless steel and tungsten carbidesubstrate by a hybrid coating method employing a cathodic arc and a magnetron sputtering source. TiAland Si target were vaporized with the cathodic arc source and the magnetron sputtering source, respectively. Process gas was the mixture of nitrogen and argon gas. With the increase of Si content, the crystallinityand the grain size of TiAlSiN film was decreased. At the Si content of more than 8 at.%, grain size ofTiAlSiN was saturated at around 2 nm. The hardness value of the TiAlSiN film increased with incorporationof Si, and had the maximum value of ~ 3,233 Hv at the Si content of 9.2 at.%. The oxidation resistanceof TiAlSiN film was enhanced with the increase of Si content.
Abstract
In this study, TiAlSiN coatings have been successfully synthesized on stainless steel and tungsten carbidesubstrate by a hybrid coating method employing a cathodic arc and a magnetron sputtering source. TiAland Si target were vaporized with the cathodic arc source and the magnetron sputtering source, respectively. Process gas was the mixture of nitrogen and argon gas. With the increase of Si content, the crystallinityand the grain size of TiAlSiN film was decreased. At the Si content of more than 8 at.%, grain size ofTiAlSiN was saturated at around 2 nm. The hardness value of the TiAlSiN film increased with incorporationof Si, and had the maximum value of ~ 3,233 Hv at the Si content of 9.2 at.%. The oxidation resistanceof TiAlSiN film was enhanced with the increase of Si content.
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