Ag 중간층 두께에 따른 ZnO 박막의 광학적, 전기적 특성 연구
Effect of Ag interlayer on the optical and electrical properties of ZnO thin films
1
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
ZnO single layer (60 nm thick) and ZnO with Ag interlayer (ZnO/Ag/ZnO; ZAZ) films were deposited on the glass substrates by using radio frequency (RF) and direct current (DC) magnetron sputter to evaluate the effectiveness of Ag interlayer on the optical visible transmittance and the conductivity of the films. In the ZAZ films, the thickness of ZnO layers was kept at 30 nm, while the Ag thickness was varied as 5, 10, 15 and 20 nm.
Abstract
ZnO single layer (60 nm thick) and ZnO with Ag interlayer (ZnO/Ag/ZnO; ZAZ) films were deposited on the glass substrates by using radio frequency (RF) and direct current (DC) magnetron sputter to evaluate the effectiveness of Ag interlayer on the optical visible transmittance and the conductivity of the films. In the ZAZ films, the thickness of ZnO layers was kept at 30 nm, while the Ag thickness was varied as 5, 10, 15 and 20 nm.
참고문헌 (13)
- M. Yahya, "The effects of argon plasma treatment on ITO properties and the performance of OLED devices", Opt. Mater, 120, pp.111400~ (2021)
- B, Barman, "Fabrication of highly conducting ZnO", Ag, Ag, pp.AZO transparent conducting oxide layers using RF magnetron sputtering at room temperature, Mater. Sci. Semicond. Process[DOI]
- B. He, "The effect of substrate temperature on high quality c-axis oriented AZO thin films prepared by DC reactive magnetron sputtering for photoelectric device applications", Superlattices Microstruct, 64, pp.319~330 (2013)
- M. Alauddin, "Effects of aluminum doping and substrate temperature on zinc oxide thin films grown by pulsed laser deposition", Appl. Phys. A, 101, pp.707~711 (2010)
- Seok‑Bon Koo, "Study on Aging Effect of Adhesion Strength Between Polyimide Film and Copper Layer", Metals and Materials International, 25(1), pp.117~126 (2019), 대한금속·재료학회[DOI]
- 최수현, "전자빔 조사 에너지에 따른 TIO", Ag, 한국생산제조학회지, pp.2021, 30(5)[DOI]
- D. Kim, "The structural and optoelectrical properties of TiON", Au, Mater. Lett, pp.2010, 64[DOI]
- B. D. Cullity, "Elements of X-ray diffraction" (1978), Addison-Wesley Pub. Co
- 김유성, "ZnO", Ag, 대한금속·재료학회지, pp.2019, 57(5)[DOI]
- S. Peng, "Influences of the RF power ratio on the optical and electrical properties of GZO thin films by DC coupled RF magnetron sputtering at room temperature", Physica B, 503, pp.111~116 (2016)
- B. G. Bagley, "Amorphous and liquid semiconductor" (1974), Plenum Press
- Y. Wang, "Electron concentration dependence of optical band gap shift in Ga-doped ZnO thin films by magnetron sputtering", Thin Solid Films, 565, pp.62~68 (2014)
- G. Haacke, "New figure of merit for transparent conductors", J. Appl. Phys, 47, pp.4086~ (1976)