플라즈마 질화처리한 사출금형소재의 비정질 탄소계 박막 증착에 따른 기계적 특성 향상 효과
The effect of mechanical properties of carbon-based thin film on plasma nitrided injection mold steel
0
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
The carbon-based films have various properties, which have been widely applied in industrial application. However, it has critical drawback for poor adhesion between films and metal substrate. In the present work, we have deposited carbon-based films on injection mold steel by plasma assisted chemical vapor deposition (PACVD). In order to improve adhesion, prior to film deposition, the substrate was nitriding-treated using PACVD. And its effect on the adhesion was investigated. Due to the pre-nitriding, the amorphous carbon nitride (a-CN:H) films presented 10 times higher adhesion (34.9 N) than that of un-nitirided. In addition, a friction coefficient was decreased from 0.29 to 0.15 for the amorphous carbon (a-C:H) due to improved adhesion. The obtained results demonstrated that pre-nitriding considerably improved the adhesion, and the relationship among adhesion, hardness, and surface roughness was discussed in detail.
Abstract
The carbon-based films have various properties, which have been widely applied in industrial application. However, it has critical drawback for poor adhesion between films and metal substrate. In the present work, we have deposited carbon-based films on injection mold steel by plasma assisted chemical vapor deposition (PACVD). In order to improve adhesion, prior to film deposition, the substrate was nitriding-treated using PACVD. And its effect on the adhesion was investigated. Due to the pre-nitriding, the amorphous carbon nitride (a-CN:H) films presented 10 times higher adhesion (34.9 N) than that of un-nitirided. In addition, a friction coefficient was decreased from 0.29 to 0.15 for the amorphous carbon (a-C:H) due to improved adhesion. The obtained results demonstrated that pre-nitriding considerably improved the adhesion, and the relationship among adhesion, hardness, and surface roughness was discussed in detail.
참고문헌 (28)
- N. Kumar, "Diamondbased field emission flat panel displays", Solid State Technology, 38, pp.71~ (1995)
- P. Stumm, "Defects, doping, and conduction mechanisms in nitrogen-doped tetrahedral amorphous carbon", Journal of Applied Physics, 81, pp.1289~ (1997)
- E. Marotta, "Diamond-like carbon as an electrical insulator of copper devices for chip cooling", Thin Solid Films, 206, pp.188~ (1991)
- F. He, "Wear properties of DLC-coated steel rollers running with highly contaminated lubrication", Tribology International, 43, pp.990~996 (2010)
- T. V. Semikina, "Optical, anti-reflective and protective properties of diamond and diamond-like carbon films", Diamond and Related Materials, 11, pp.1329~1331 (2002)
- N. Dwivedi, "Oxygen modified diamond-like carbon as window layer for amorphous silicon solar cells", Solar Energy, 86, pp.220~230 (2012)
- B. Podgornik, "Tribological reactions between oil additives and DLC coatings for automotive applications", Surface and Coatings Technology, 200, pp.1982~1989 (2005)
- R. Cruz, "DLC–ceramic multilayers for automotive applications", Diamond and Related Materials, 15, pp.2055~2060 (2006)
- K. Taube, "Improvement of carbon-based coatings for use in the cold forming of nonferrous metals", Surface and Coatings Technology, 68, pp.662~ (1994)
- K. R. Lee, "Design of w buffer layer for adhesion improvement of DLC films on tool steels", Thin Solid Films, 377, pp.261~268 (2000)
- T. Takeno, "Deposition of DLC film with adhesive W-DLC layer on stainless steel and its tribological properties", Diamond and Related Materials, 18, pp.1023~1027 (2009)
- W. J. Wu, "The effect of residual stress on adhesion of silicon-containing diamond-like carbon coatings", Thin Solid Films, 345, pp.200~207 (1999)
- L. F. Bonetti, "The effect of residual stress on adhesion of silicon-containing diamond-like carbon coatings", Thin Solid Films, 515, pp.375~379 (2006)
- B. H. Lung, "Effect of gradient a-SiCx interlayer on adhesion of DLC films", Mater. Chemical Physics, 72, pp.163~166 (2001)
- R. F. Huang, "Wear-resistant multilayered diamondlike carbon coating prepared by pulse biased arc ion plating", Diamond and Related Materials, 10, pp.1850~1854 (2001)
- L. Hongxi, "Wear behaviour and rolling contact fatigue life of Ti", TiN, Vacuum, pp.2012, 86[DOI]
- H. Li, "Annealing effect on the structure, mechanical and tribological properties of hydrogenated diamond-like carbon films", Thin Solid Films, 515, pp.2153~2160 (2006)
- W. Zhang, "Study on the diamond-like carbon multilayer films for tribological application", Diamond and Related Materials, 14, pp.1361~1367 (2005)
- C. G. Fountzoulas, "Nitrogen ion implantation of silicon-containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition", Surface and Coatings Technology, 103–104, pp.104~108 (1998)
- A. A. Voevodina, "Comparative study of wearresistant DLC and fullerene-like CNx coatings produced by pulsed laser and filtered cathodic arc depositions", Surface and Coatings Technology, 197, pp.116~125 (2005)
- S. Adhikari, "Comparative study of wear-resistant DLC and fullerenelike CNx coatings produced by pulsed laser and filtered cathodic arc depositions", Diamond and Related Materials, 15, pp.913~916 (2006)
- N. A. Sánchez, "Characterization of diamond-like carbon(DLC)thin films prepared by rf magnetron sputtering", Thin Solid Films, 373, pp.247~250 (2000)
- K. Y. Lia, "Study of tribological performance of ECR–CVD diamond-like carbon coatings on steel substrates", Wear, 258, pp.1577~1588 (2005)
- H. Miki, "Tribological properties of multilayer DLC", W-DLC films on Si, 2008, pp.516, 5414~5418
- L. Hongxi, "Wear behaviour and rolling contact fatigue life of Ti", TiN, Vacuum, pp.2012, 86[DOI]
- W. Tillmann, "Influences of substrate pretreatments and Ti", Cr interlayers on the adhesion and hardness of CrAlSiN and TiAlSiN films deposited on Al2O3 and ZrO2-8Y2O3 thermal barrier coatings, 2019, pp.12, 2206~2212
- X. He, "Empirical relationship between interfacial shear stress and contact pressure in micro-and macro-scale friction", Tribology International, 155, pp.106780~ (2021)
- M. Tahara, "Improvement in adhesion of polyethylene by glow-discharge plasma", Surface and Coatings Technology, 174, pp.826~830 (2003)