Chemiresistive Sensor Based on One-Dimensional WO3 Nanostructures as Non-Invasive Disease Monitors
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In this study, a chemiresistive sensor based on one-dimensional WO3 nanostructures is presented for application in non-invasive medical diagnostics. WO3 nanostructures were used as an active gas sensing layer and were deposited onto a SiO2/Si substrate using Pt interdigitated electrodes (IDEs). The IDE spacing was 5 μm and deposition was performed using RF sputter with glancing angle deposition mode. Pt IDEs fabricated by photolithography and dry etching. In comparison with thin film sensor, sensing performance of nanostructure sensor showed an enhanced response of more than 20 times when exposed to 50 ppm acetone at 400°C. Such a remarkable faster response can pave the way for a new generation of exhaled breath analyzers based on chemiresistive sensors which are less expensive, more reliable, and less complicated to be manufactured. Moreover, presented sensor technology has the potential of being used as a personalized medical diagnostics tool in the near future.
Abstract
In this study, a chemiresistive sensor based on one-dimensional WO3 nanostructures is presented for application in non-invasive medical diagnostics. WO3 nanostructures were used as an active gas sensing layer and were deposited onto a SiO2/Si substrate using Pt interdigitated electrodes (IDEs). The IDE spacing was 5 μm and deposition was performed using RF sputter with glancing angle deposition mode. Pt IDEs fabricated by photolithography and dry etching. In comparison with thin film sensor, sensing performance of nanostructure sensor showed an enhanced response of more than 20 times when exposed to 50 ppm acetone at 400°C. Such a remarkable faster response can pave the way for a new generation of exhaled breath analyzers based on chemiresistive sensors which are less expensive, more reliable, and less complicated to be manufactured. Moreover, presented sensor technology has the potential of being used as a personalized medical diagnostics tool in the near future.
참고문헌 (13)
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