Ti 함량 변화에 따른 Ti/ta-C 다층 박막의 구조 및 기계적 특성에 관한 연구
Structural and Mechanical Properties of Ti/ta-C Multilayer Coatings with Varying Ti Content
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Abstract
Ti/ta-C multilayer films were synthesized using a hybrid deposition system combining filtered cathodic vacuum arc (FCVA) and unbalanced magnetron sputtering (UBMS). Alternating Ti and ta-C layers were deposited on cold-rolled steel substrates, with Ti content controlled by adjusting the UBMS power (200–400 W). Structural analysis via FE-STEM confirmed uniform, dense layering. XPS revealed increased Ti–C and Ti–O bond formation with higher Ti content, while Raman spectroscopy showed a rising ID/IG ratio, indicating increased sp² cluster formation and structural distortion. Mechanical testing demonstrated that Ti incorporation reduced hardness, elastic modulus, and compressive residual stress.