하이브리드 코팅 시스템으로 제조된 초고경도 Cr-Si-C-N 나노복합 코팅막의 미세구조 및 기계적 특성

Abstract

Cr-Si-C-N coatings were deposited on steel substrate (SKD11) by a hybrid system of arc ion plating (AIP) and sputtering techniques. From XRD, XPS, and HRTEM analyses, it was found that Cr-Si-C-N had a fine composite microstructure comprising nano-sized crystallites of Cr(C,N) well distributed in the amorphous phase of Si3N4/SiC mixture. Microhardness of Cr(C,N) coatings and Cr-Si-N coatings were reported about ~22 GPa and ~35 GPa, respectively. As the Si was incorporated into Cr(C,N) coatings, The Cr-Si-C-N coatings having a Si content of 9.2 at.% showed the maximum hardness value. As increased beyond Si content of 9.2 at.%, the interaction between nanocrystallites and amorphous phase was gone, the hardness was reduced as dependent on amorphous phase of Si3N4/SiC. In addition, the average coefficient of Cr-Si-C-N coatings largely decreased compared with Cr(C,N) coatings.