Ti-Al-N 과 Ti-Al-Si-N 코팅막의 상 특성 및 내산화 거동
Phase Characterization and Oxidation Behavior of Ti-Al-N and Ti-Al-Si-N Coating
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Abstract
Ti-Al-N (Ti75Al25N) and Ti-Al-Si-N (Ti69Al23Si8N) coatings synthesized by a DC magnetron sputtering technique were studied comparatively with respect to phase characterization and high-temperature oxidation behavior. Ti69Al23Si8N coating had a nanocomposite microstructure consisting of nanosized (Ti,Al,Si)N crystallites and amorphous Si3N4, with smooth surface morphology. Ti-Al-N coating of which surface Al2O3 layer formed during oxidation suppressed further oxidation. It was sufficiently stable against oxidation up to about 700oC. Ti-Al-Si-N coating showed better oxidation resistance because both surface Al2O3 and near-surface SiO2 layers suppressed further oxidation. XRD, GDOES, XPS, and scratch tests were performed.