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Review on Transfer Process of Two-dimensional Materials

김재현|윤민아|김광섭|김찬|장봉균
한국트라이볼로지학회 (Korean Tribology Society)|2020.02|한국트라이볼로지학회지 (Tribology and Lubricants)|제36권 제1호|pp. 1-10|DOI https://doi.org/10.9725/kts.2020.36.1.1

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키워드

2D materialstransfer processchemical-vapor deposition
주제분류기계공학

초록

Large-area two-dimensional (2D) materials synthesized by chemical vapor deposition on donor substrates are promising functional materials for conductors, semiconductors, and insulators in flexible and transparent devices. In most cases, 2D materials should be transferred from a donor substrate to a target substrate; however, 2D materials are prone to damage during the transfer process. The damages to 2D materials during transfer are caused by contamination, tearing, and chemical doping. For the commercialization of 2D materials, a damage-free, large-area, and productive transfer process is needed. However, a transfer process that meets all three requirements has yet to be developed. In this paper, we review the recent progress in the development of transfer processes for 2D materials, and discuss the principles, advantages, and limitations of each process. The future prospects of transfer processes are also discussed. To simplify the discussion, the transfer processes are classified into four categories: wet transfer, dry transfer, mechanical transfer, and electrochemical transfer. Finally, the “roll-to-roll” and “roll-to-plate” dry transfer process is proposed as the most promising method for the commercialization of 2D materials. Moreover, for successful dry transfer of 2D materials, it is necessary to clearly understand the adhesion properties, viscoelastic behaviors, and mechanical deformation of the transfer film used as a medium in the transfer process.

Abstract

Large-area two-dimensional (2D) materials synthesized by chemical vapor deposition on donor substrates are promising functional materials for conductors, semiconductors, and insulators in flexible and transparent devices. In most cases, 2D materials should be transferred from a donor substrate to a target substrate; however, 2D materials are prone to damage during the transfer process. The damages to 2D materials during transfer are caused by contamination, tearing, and chemical doping. For the commercialization of 2D materials, a damage-free, large-area, and productive transfer process is needed. However, a transfer process that meets all three requirements has yet to be developed. In this paper, we review the recent progress in the development of transfer processes for 2D materials, and discuss the principles, advantages, and limitations of each process. The future prospects of transfer processes are also discussed. To simplify the discussion, the transfer processes are classified into four categories: wet transfer, dry transfer, mechanical transfer, and electrochemical transfer. Finally, the “roll-to-roll” and “roll-to-plate” dry transfer process is proposed as the most promising method for the commercialization of 2D materials. Moreover, for successful dry transfer of 2D materials, it is necessary to clearly understand the adhesion properties, viscoelastic behaviors, and mechanical deformation of the transfer film used as a medium in the transfer process.

참고문헌 (66)

  1. A. K. Geim, "The rise of graphene", Nature Materials, 6(3), pp.183~191 (2007), Springer Science and Business Media LLC[DOI]
  2. A. K. Geim, "Van der Waals heterostructures", Nature, 499(7459), pp.419~425 (2013), Springer Science and Business Media LLC[DOI]
  3. "Expanding our 2D vision", Nature Reviews Materials, 1(11) (2016), Springer Science and Business Media LLC[DOI]
  4. Keun Soo Kim, "Large-scale pattern growth of graphene films for stretchable transparent electrodes", Nature, 457(7230), pp.706~710 (2009), Springer Science and Business Media LLC[DOI]
  5. X. Li, "Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils", Science, 324(5932), pp.1312~1314 (2009), American Association for the Advancement of Science (AAAS)[DOI]
  6. Ki Kang Kim, "Synthesis of Monolayer Hexagonal Boron Nitride on Cu Foil Using Chemical Vapor Deposition", Nano Letters, 12(1), pp.161~166 (2011), American Chemical Society (ACS)[DOI]
  7. Joo Song Lee, "Wafer-scale single-crystal hexagonal boron nitride film via self-collimated grain formation", Science, 362(6416), pp.817~821 (2018), American Association for the Advancement of Science (AAAS)[DOI]
  8. Yongjie Zhan, "Large-area vapor-phase growth and characterization of MoS2 atomic layers on a SiO2 substrate", Small, 8(7), pp.966~971 (2012), Wiley[DOI]
  9. Kibum Kang, "High-mobility three-atom-thick semiconducting films with wafer-scale homogeneity", Nature, 520(7549), pp.656~660 (2015), Springer Science and Business Media LLC[DOI]
  10. Li Wang, "Epitaxial growth of a 100-square-centimetre single-crystal hexagonal boron nitride monolayer on copper", Nature, 570(7759), pp.91~95 (2019), Springer Science and Business Media LLC[DOI]
  11. Yi Chen, "Progress and Challenges in Transfer of Large‐Area Graphene Films", Advanced Science, 3(8), pp.1500343~ (2016), Wiley[DOI]
  12. Lai‐Peng Ma, "Transfer Methods of Graphene from Metal Substrates: A Review", Small Methods, 3(7), pp.1900049~ (2019), Wiley[DOI]
  13. Seongjun Park, "The puzzle of graphene commercialization", Nature Reviews Materials, 1(11) (2016), Springer Science and Business Media LLC[DOI]
  14. Bing Deng, "Toward Mass Production of CVD Graphene Films", Advanced Materials, 31(9), pp.1800996~ (2019), Wiley[DOI]
  15. Sang-Hoon Bae, "Integration of bulk materials with two-dimensional materials for physical coupling and applications", Nature Materials, 18(6), pp.550~560 (2019), Springer Science and Business Media LLC[DOI]
  16. Xuesong Li, "Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes", Nano Letters, 9(12), pp.4359~4363 (2009), American Chemical Society (ACS)[DOI]
  17. Sachin M. Shinde, "Surface-Functionalization-Mediated Direct Transfer of Molybdenum Disulfide for Large-Area Flexible Devices", Advanced Functional Materials, 28(13), pp.1706231~ (2018), Wiley[DOI]
  18. A. Pirkle, "The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to SiO2", Applied Physics Letters, 99(12), pp.122108~ (2011), AIP Publishing[DOI]
  19. Yung-Chang Lin, "Clean Transfer of Graphene for Isolation and Suspension", ACS Nano, 5(3), pp.2362~2368 (2011), American Chemical Society (ACS)[DOI]
  20. Xuelei Liang, "Toward Clean and Crackless Transfer of Graphene", ACS Nano, 5(11), pp.9144~9153 (2011), American Chemical Society (ACS)[DOI]
  21. Yung-Chang Lin, "Graphene Annealing: How Clean Can It Be?", Nano Letters, 12(1), pp.414~419 (2011), American Chemical Society (ACS)[DOI]
  22. Hyesung Park, "Graphene As Transparent Conducting Electrodes in Organic Photovoltaics: Studies in Graphene Morphology, Hole Transporting Layers, and Counter Electrodes", Nano Letters, 12(1), pp.133~140 (2011), American Chemical Society (ACS)[DOI]
  23. Cheng Gong, "Rapid Selective Etching of PMMA Residues from Transferred Graphene by Carbon Dioxide", The Journal of Physical Chemistry C, 117(44), pp.23000~23008 (2013), American Chemical Society (ACS)[DOI]
  24. Ji Won Suk, "Enhancement of the Electrical Properties of Graphene Grown by Chemical Vapor Deposition via Controlling the Effects of Polymer Residue", Nano Letters, 13(4), pp.1462~1467 (2013), American Chemical Society (ACS)[DOI]
  25. Hee Jin Jeong, "Improved transfer of chemical-vapor-deposited graphene through modification of intermolecular interactions and solubility of poly(methylmethacrylate) layers", Carbon, 66, pp.612~618 (2014), Elsevier BV[DOI]
  26. Gabriela Borin Barin, "Optimized graphene transfer: Influence of polymethylmethacrylate (PMMA) layer concentration and baking time on graphene final performance", Carbon, 84, pp.82~90 (2015), Elsevier BV[DOI]
  27. G. Deokar, "Towards high quality CVD graphene growth and transfer", Carbon, 89, pp.82~92 (2015), Elsevier BV[DOI]
  28. Yuanyuan Han, "Clean surface transfer of graphene films via an effective sandwich method for organic light-emitting diode applications", J. Mater. Chem. C, 2(1), pp.201~207 (2014), Royal Society of Chemistry (RSC)[DOI]
  29. Hyun Ho Kim, "Clean transfer of wafer-scale graphene via liquid phase removal of polycyclic aromatic hydrocarbons", ACS Nano, 9(5), pp.4726~4733 (2015), American Chemical Society (ACS)[DOI]
  30. Huynh Van Ngoc, "PMMA-Etching-Free Transfer of Wafer-scale Chemical Vapor Deposition Two-dimensional Atomic Crystal by a Water Soluble Polyvinyl Alcohol Polymer Method", Scientific Reports, 6(1) (2016), Springer Science and Business Media LLC[DOI]
  31. Somyeong Shin, "Graphene transfer with self-doping by amorphous thermoplastic resins", Carbon, 111, pp.215~220 (2017), Elsevier BV[DOI]
  32. Zhikun Zhang, "Rosin-enabled ultraclean and damage-free transfer of graphene for large-area flexible organic light-emitting diodes", Nature Communications, 8(1) (2017), Springer Science and Business Media LLC[DOI]
  33. Wei Sun Leong, "Paraffin-enabled graphene transfer", Nature Communications, 10(1) (2019), Springer Science and Business Media LLC[DOI]
  34. Matthew J. Allen, "Soft Transfer Printing of Chemically Converted Graphene", Advanced Materials, 21(20), pp.2098~2102 (2009), Wiley[DOI]
  35. Youngbin Lee, "Wafer-Scale Synthesis and Transfer of Graphene Films", Nano Letters, 10(2), pp.490~493 (2010), American Chemical Society (ACS)[DOI]
  36. Guang-Xin Ni, "Quasi-Periodic Nanoripples in Graphene Grown by Chemical Vapor Deposition and Its Impact on Charge Transport", ACS Nano, 6(2), pp.1158~1164 (2012), American Chemical Society (ACS)[DOI]
  37. Dae Woo Kim, "The effects of the crystalline orientation of Cu domains on the formation of nanoripple arrays in CVD-grown graphene on Cu", Journal of Materials Chemistry C, 1(47), pp.7819~ (2013), Royal Society of Chemistry (RSC)[DOI]
  38. Sukang Bae, "Roll-to-roll production of 30-inch graphene films for transparent electrodes", Nature Nanotechnology, 5(8), pp.574~578 (2010), Springer Science and Business Media LLC[DOI]
  39. Junmo Kang, "Efficient Transfer of Large-Area Graphene Films onto Rigid Substrates by Hot Pressing", ACS Nano, 6(6), pp.5360~5365 (2012), American Chemical Society (ACS)[DOI]
  40. Jie Song, "A general method for transferring graphene onto soft surfaces", Nature Nanotechnology, 8(5), pp.356~362 (2013), Springer Science and Business Media LLC[DOI]
  41. Xu-Dong Chen, "High-quality and efficient transfer of large-area graphene films onto different substrates", Carbon, 56, pp.271~278 (2013), Elsevier BV[DOI]
  42. Taejun Choi, "Roll-to-roll continuous patterning and transfer of graphene via dispersive adhesion", Nanoscale, 7(16), pp.7138~7142 (2015), Royal Society of Chemistry (RSC)[DOI]
  43. Yi Rang Lim, "Roll-to-Roll Production of Layer-Controlled Molybdenum Disulfide: A Platform for 2D Semiconductor-Based Industrial Applications", Advanced Materials, 30(5), pp.1705270~ (2018), Wiley[DOI]
  44. Sang Jin Kim, "Ultraclean Patterned Transfer of Single-Layer Graphene by Recyclable Pressure Sensitive Adhesive Films", Nano Letters, 15(5), pp.3236~3240 (2015), American Chemical Society (ACS)[DOI]
  45. Zhen-Yu Juang, "Graphene synthesis by chemical vapor deposition and transfer by a roll-to-roll process", Carbon, 48(11), pp.3169~3174 (2010), Elsevier BV[DOI]
  46. Bananakere Nanjegowda Chandrashekar, "Roll-to-Roll Green Transfer of CVD Graphene onto Plastic for a Transparent and Flexible Triboelectric Nanogenerator", Advanced Materials, 27(35), pp.5210~5216 (2015), Wiley[DOI]
  47. Bananakere Nanjegowda Chandrashekar, "A Universal Stamping Method of Graphene Transfer for Conducting Flexible and Transparent Polymers", Scientific Reports, 9(1) (2019), Springer Science and Business Media LLC[DOI]
  48. Shinichi Tanabe, "Etchant-free and damageless transfer of monolayer and bilayer graphene grown on SiC", Japanese Journal of Applied Physics, 53(11), pp.115101~ (2014), IOP Publishing[DOI]
  49. Sang Yoon Yang, "Metal-Etching-Free Direct Delamination and Transfer of Single-Layer Graphene with a High Degree of Freedom", Small, 11(2), pp.175~181 (2015), Wiley[DOI]
  50. Li Tao, "Deterministic and Etching-Free Transfer of Large-Scale 2D Layered Materials for Constructing Interlayer Coupled van der Waals Heterostructures", Advanced Materials Technologies, 3(5), pp.1700282~ (2018), Wiley[DOI]
  51. Abhay Shivayogimath, "Do-It-Yourself Transfer of Large-Area Graphene Using an Office Laminator and Water", Chemistry of Materials, 31(7), pp.2328~2336 (2019), American Chemical Society (ACS)[DOI]
  52. Ruizhi Wang, "A Peeling Approach for Integrated Manufacturing of Large Monolayer h-BN Crystals", ACS Nano (2019), American Chemical Society (ACS)[DOI]
  53. Taeshik Yoon, "Direct Measurement of Adhesion Energy of Monolayer Graphene As-Grown on Copper and Its Application to Renewable Transfer Process", Nano Letters, 12(3), pp.1448~1452 (2012), American Chemical Society (ACS)[DOI]
  54. Seung Ryul Na, "Selective Mechanical Transfer of Graphene from Seed Copper Foil Using Rate Effects", ACS Nano, 9(2), pp.1325~1335 (2015), American Chemical Society (ACS)[DOI]
  55. Sumin Kang, "Role of Crack Deflection on Rate Dependent Mechanical Transfer of Multilayer Graphene and Its Application to Transparent Electrodes", ACS Applied Nano Materials, 2(4), pp.1980~1985 (2019), American Chemical Society (ACS)[DOI]
  56. Yu Wang, "Electrochemical Delamination of CVD-Grown Graphene Film: Toward the Recyclable Use of Copper Catalyst", ACS Nano, 5(12), pp.9927~9933 (2011), American Chemical Society (ACS)[DOI]
  57. Libo Gao, "Repeated growth and bubbling transfer of graphene with millimetre-size single-crystal grains using platinum", Nature Communications, 3(1) (2012), Springer Science and Business Media LLC[DOI]
  58. Christie Thomas Cherian, "‘Bubble-Free’ Electrochemical Delamination of CVD Graphene Films", Small, 11(2), pp.189~194 (2015), Wiley[DOI]
  59. Filippo Pizzocchero, "Non-destructive electrochemical graphene transfer from reusable thin-film catalysts", Carbon, 85, pp.397~405 (2015), Elsevier BV[DOI]
  60. Di-Yan Wang, "Clean-Lifting Transfer of Large-area Residual-Free Graphene Films", Advanced Materials, 25(32), pp.4521~4526 (2013), Wiley[DOI]
  61. Wei-Hsiang Lin, "A Direct and Polymer-Free Method for Transferring Graphene Grown by Chemical Vapor Deposition to Any Substrate", ACS Nano, 8(2), pp.1784~1791 (2014), American Chemical Society (ACS)[DOI]
  62. Jeongmin Seo, "Direct Graphene Transfer and Its Application to Transfer Printing Using Mechanically Controlled, Large Area Graphene", Copper Freestanding Layer, 2018, pp.28(26), 1707102~[DOI]
  63. Guohui Zhang, "Versatile Polymer-Free Graphene Transfer Method and Applications", ACS Applied Materials & Interfaces, 8(12), pp.8008~8016 (2016), American Chemical Society (ACS)[DOI]
  64. M. Hempel, "Repeated roll-to-roll transfer of two-dimensional materials by electrochemical delamination", Nanoscale, 10(12), pp.5522~5531 (2018), Royal Society of Chemistry (RSC)[DOI]
  65. Jang, B., "Damage mitigation in roll-to-roll transfer of CVD-graphene to flexible substrates", 2D Mater (2017)[DOI]
  66. 윤민아, "전사 방법에 따른 그래핀의 표면 에너지 변화", 한국트라이볼로지학회지, 35(1), pp.9~15 (2019), 한국트라이볼로지학회[DOI]

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