High-Yield Etching-Free Transfer of Graphene: A Fracture Mechanics Approach
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Transfer is the critical issue of producing high-quality and scalable graphene electronic devices. However, conventional transfer processes require the removal of an underlying metal layer by wet etching process, which inducessignificant economic and environmental problems. We propose the etching-free mechanical releasing of graphene usingpolymer adhesives. A fracture mechanics approach was introduced to understand the releasing mechanism and ensure highyieldprocess. It is shown that the thickness of adhesive and target substrate affect the transferability of graphene. Basedon experimental and fracture mechanics simulation results, we further observed that compliant adhesives can reduce theadhesive stress during the transfer, which also enhances the success probability of graphene transfer.
Abstract
Transfer is the critical issue of producing high-quality and scalable graphene electronic devices. However, conventional transfer processes require the removal of an underlying metal layer by wet etching process, which inducessignificant economic and environmental problems. We propose the etching-free mechanical releasing of graphene usingpolymer adhesives. A fracture mechanics approach was introduced to understand the releasing mechanism and ensure highyieldprocess. It is shown that the thickness of adhesive and target substrate affect the transferability of graphene. Basedon experimental and fracture mechanics simulation results, we further observed that compliant adhesives can reduce theadhesive stress during the transfer, which also enhances the success probability of graphene transfer.
참고문헌 (30)
- A. K. Geim, "The rise of graphene", Nature Materials, 6(3), pp.183~ (2007)
- S. K. Bae, "Roll-to-roll production of 30-inch graphene films for transparent electrodes", NATURE NANOTECHNOLOGY, 5(8), pp.574~578 (2010), NATURE PUBLISHING GROUP
- J. S. Bunch, "Electromechanical Resonators from Graphene Sheets", Science, 315(5811), pp.490~ (2007)
- S. S. Roy, "Improving Graphene Diffusion Barriers via Stacking Multiple Layers and Grain Size Engineering", Advanced Functional Materials, 23(29), pp.3638~ (2013)
- F. Schwierz, "Graphene transistors", Nature nanotechnology, 5(7), pp.487~ (2010)
- A. Reina, "Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition", Nano Lett, 9(1), pp.30~ (2008)
- X. Li, "Large-Area Synthesis of High- Quality and Uniform Graphene Films on Copper Foils", Science, 324(5932), pp.1312~ (2009)
- K. S. Kim, "Large-scale pattern growth of graphene films for stretchable transparent electrodes", NATURE, 457(7230), pp.706~710 (2009), NATURE PUBLISHING GROUP
- S. Chen, "Oxidation resistance of graphene-coated Cu and Cu", Ni alloy, 2011, pp.5(2), 1321~
- S.-E. Zhu, "Graphene-based bimorph microactuators", Nano letters, 11(3), pp.977~ (2011)
- L. G. Martins, "Direct transfer of graphene onto flexible substrates", Proceedings of the National Academy of Sciences of the United States of America, 110(44), pp.17762~ (2013)
- J. Song, "A general method for transferring graphene onto soft surfaces", Nature Nanotechnology, 8(5), pp.356~362 (2013)
- D. Y. Wang, "Clean-Lifting Transfer of Large-area Residual-Free Graphene Films", Advanced Materials, 25(32), pp.4521~ (2013)
- J. Kang, "Efficient Transfer of Large-Area Graphene Films onto Rigid Substrates by Hot Pressing", ACS nano., 6(6), pp.5360~ (2012)
- V. P. Verma, "Large-area graphene on polymer film for flexible and transparent anode in field emission device", Applied Physics Letters, 96(20), pp.203108~ (2010)
- T. Kobayashi, "Production of a 100-m-long high-quality graphene transparent conductive film by roll-to-roll chemical vapor deposition and transfer process", Appl. Phys. Lett., 102(2), pp.0231120~ (2013)
- X. Li, "Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes", Nano Lett., 9(12), pp.4359~ (2009)
- 조상욱, "롤투롤 공정을 이용한 광정렬 구조 내장형 광소자 연구", 마이크로전자 및 패키징학회지, 20(3), pp.19~22 (2013), 한국마이크로전자및패키징학회[DOI]
- 이미경, "폴리머 기판 위에 전사된 실리콘 박막의 기계적 유연성 연구", 마이크로전자 및 패키징학회지, 20(3), pp.23~29 (2013), 한국마이크로전자및패키징학회[DOI]
- Y. Wang, "Electrochemical Delamination of CVD-Grown Graphene Film: Toward the Recyclable Use of Copper Catalyst", ACS Nano., 5(12), pp.9927~ (2011)
- L. Gao, "Repeated growth and bubbling transfer of graphene with millimetre-size single-crystal grains using platinum", Nature Communications, 3(699), pp.1~ (2012)
- E. H. Lock, "High-Quality Uniform Dry Transfer of Graphene to Polymers", Nano Lett., 12(1), pp.102~ (2011)
- C. Kim, "Direct transfer of graphene without the removal of a metal substrate using a liquid polymer", SCRIPTA MATERIALIA, 66(8), pp.535~537 (2012), PERGAMON-ELSEVIER SCIENCE LTD
- T. Yoon, "Direct Measurement of Adhesion Energy of Monolayer Graphene As-Grown on Copper and Its Application to Renewable Transfer Process", NANO LETTERS, 12(3), pp.1448~1452 (2012), AMER CHEMICAL SOC
- Z. Suo, "Interface crack between two elastic layers", International Journal of Fracture., 43(1), pp.1~ (1990)
- J. W. Hutchinson, "Mixed Mode Cracking in Layered Materials", Advances in Applied Mechanics., 29(63), pp.191~ (1992)
- A. Kamer, "Adhesion and degradation of hard coatings on poly (methyl methacrylate) substrates", Thin Solid Films., 519(6), pp.1907~ (2011)
- S. P. Koenig, "Ultrastrong adhesion of graphene membranes", Nature nanotechnology, 6(9), pp.543~ (2011)
- M. Kanninen, "An augmented double cantilever beam model for studying crack propagation and arrest", International Journal of Fracture, 9(1), pp.83~ (1973)
- A. C. Ferrari, "Raman Spectrum of Graphene and Graphene Layers", Phys. Rev. Lett., 97, pp.187401~ (2006)
