박막트랜지스터 구동회로용 ZnO 박막의 구조적 특성에 관한 연구
The structural characteristics of ZnO thin films for TFT driver circuit
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RF 마그네트론 스퍼터링법의 스퍼터링 조건에 따른 TFT 구동회로를 위한 ZnO 박막의 구조적특성에 관해 연구하였다. ZnO 박막은 RF 파워 및 증착압력을 변화시킴으로서 성장시켰다. 구조적특성은 X-선 회절 분석기(XRD)와 원자력간 현미경(AFM)에 의해 분석되었다. ZnO 박막은 100W의RF 파워에서 충분한 결정도를 가졌다. 그러나 RF 파워가 증가함에 따라 ZnO 박막의 표면 거칠기가증가하였고 증착압력이 5mTorr에서 15mTorr로 증가함에 따라 ZnO(002) 피크의 반치폭(FWHM)이 증가하였다.
Abstract
The effect of sputtering condition on the structural properties of ZnO thin films grown by RF magnetron sputtering system was investigated for TFT driver circuit. ZnO thin films were grown with ZnO target varying RF power and working pressure. Structural properties were investigated by X-ray diffraction (XRD) and atomic force microscope (AFM). The ZnO thin films have sufficient crystallinity on the 100W RF power. But, the surface roughness of ZnO films was increased as increased RF power. As increased working pressure from 5 mTorr to 15 mTorr, a full width at half maximum (FWHM) of ZnO (002) peak was increased.
참고문헌 (10)
- 길경석, "식물성 플랑크톤에 대한 UV LED의 살균성능 분석", 한국마린엔지니어링학회지, 33(6), pp.959~964 (2009), 한국마린엔지니어링학회
- D. J. Jones, "Optical properties of AlN determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry data", Journal of Materials Research, 14(11), pp.4337~4344 (1999)
- P. G. Le Comber, "Amorphous-silicon field-effect device and possible application", Electronics Letters, 15(6), pp.179~181 (1979)
- F. C. Lin, "Zinc oxide varistor gas sensors : I, effect of Bi2O3 content on the H2-sensing properties", Journal of American Ceramic Society, 78(9), pp.2301~2306 (1995)
- M. H. Francombe, "Growth and properties of piezoelectric and ferroelectric films", Journal of Vacuum Science and Technology A, 8(3), pp.1382~1390 (1990)
- M. S. Wu, "Low-loss ZnO optical waveguides for SAW-AO applications", IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 36(4), pp.442~445 (1989)
- Y. Chen, "ZnO as a novel photonic material for the UV region", Materials Science and Engineering: B, 75(2), pp.190~198 (2000)
- D. C. Look, "Recent advances in ZnO materials and devices", Materials science and engineering: B, 80(1), pp.383~387 (2001)
- Y. R. Ryu, "Synthesis of p-type ZnO films", Journal of Crystal Growth, 216, pp.330~334 (2000)
- Satoshi Masuda, "Transparent thin film transistors using ZnO as an active channel layer and their electrical properties", Journal of Applied Physics, 93(3), pp.1624~1630 (2003)