광학부품의 진공자외선특성 측정용 분광반사율계 제작

Abstract

We fabricated a vacuum ultraviolet spectro-reflectometer which consists of a deuterium light source, a vacuum monochromator, and a sample chamber and detector module. The operation was performed in the ultraviolet spectral ranges between 115 nm and 330 nm at the vacuum pressure of 3.0 x 10-4 Pa. The wavelength of the vacuum monochromator was calibrated with the line spectrum of a low pressure Mercury lamp of 253.652 nm and 184.95 nm wavelengths, and its resolution was 0.012 nm, and the precision of wavelength was ± 0.03 nm. With this reflectometer and a deuterium lamp, we measured the spectral regular transmittance and reflectance of materials(MgF2, CaF2, BaF2, SiO2 , Sapphire) used as optical components over the spectral range between 115 nm and 230 nm.