A CMOS Micro Array DNA Biosensor with an On-chip Controlled Electrolyte Electrochemical Potential Regulator
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A 12 X 12 and 32 X 32 sensor array chip for fully electronic bio material detection is presented. The sensor principle is based on a carbon nanotube field effect transistor (CNT-FET). Each sensor cell of the array chip contains a buffer circuit which provides independent sensing signal to the common correlated double sampling type successive approximation register analog/digital converter. By using the CNT-FET’s electrolyte gate characteristics, we successfully stabilized the electrochemical potential of electrolyte through voltage regulator circuits. Proper operation of the chip is demonstrated by electrochemical experiments and actual sensor realization. The chip is fabricated on the basis of a 0.35um CMOS process for a 12 X 12 array and a 32 X 32 sensor array.
Abstract
A 12 X 12 and 32 X 32 sensor array chip for fully electronic bio material detection is presented. The sensor principle is based on a carbon nanotube field effect transistor (CNT-FET). Each sensor cell of the array chip contains a buffer circuit which provides independent sensing signal to the common correlated double sampling type successive approximation register analog/digital converter. By using the CNT-FET’s electrolyte gate characteristics, we successfully stabilized the electrochemical potential of electrolyte through voltage regulator circuits. Proper operation of the chip is demonstrated by electrochemical experiments and actual sensor realization. The chip is fabricated on the basis of a 0.35um CMOS process for a 12 X 12 array and a 32 X 32 sensor array.
참고문헌 (3)
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- K. Besteman, "Enzyme-coated carbon nanotubes as single-molecule biosensors", Nano Lett, 3(6), pp.727~730 (2003)
- J. W. Ko, "Multi-order dynamic range DNA sensor using a gold decorated SWCNT random network", ACS Nano, 5(6), pp.4365~4372 (2011)