Tunable RF 기기 적용을 위한 ALD-HfO2의 마이크로파 대역 강유전체 특성 고찰
Study on the Ferroelectric Properties of ALD-HfO2 in Microwave Band for Tunable RF Apparatus
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초록
본 논문에서는 tunable RF 기기에 적용이 가능한 HfO2 강유전체를 활용하여 metal-ferroelectric-metal (MFM) 커패시터를 구현하였으며 마이크로파 대역주파수 까지 전압에 따른 커패시턴스 tunability 특성을 고찰 하였다. 1kHz부터 5GHz 대역에 이르기까지 광범위한 범위의 커패시턴스-전압 특성을 분석하였으며 커패시턴스 tunability는 500 MHz 이상의 주파수에서 2.5 GHz 대역까지 ~3 %의 tunability가 유지되는 것을 확인 하여 마이크로파 주파수 대역에서 ALD HfO2기반 전자 제어 가변 커패시터의 사용 가능성을 입증하였다.
Abstract
In this work, We investigated the frequency-dependent capacitance tunability of a metal-ferroelectric-metal variable capacitor fabricated using ALD HfO2 ferroelectric material. The capacitance of the MFM capacitor could be tuned as a function of the bias voltage, up to the microwave frequency range. We observed a capacitance tuning range of ~3 % up to 2.5 GHz, proving the feasibility of the use of ALD HfO2 in the microwave frequency band.
참고문헌 (10)
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