광음향효과를 이용한 게르마늄 나노구조 기반의 초음파 발생 소자 연구
Optoacoustic Ultrasound Generator Based on Nanostructured Germanium
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초록
본 논문에서는 MAC(metal-assisted chemical) 에칭을 이용하여 Ge(Germanium) 표면에 나노구조를 형성하고, 그 위에 열팽창계수가 높은 PDMS를 적용하여 광음향효과를 이용한 초음파 발생 소자를 제작하였다. Ge 나노구조 위에 PDMS를 스핀 코팅하여만든 초음파 발생 소자는 100 nm Cr(Chromium) 대비 약 3배의 초음파를 발생시켰다. 또한, Ge 나노구조를 PDMS 중앙에 위치시킬 경우 쿼츠 기판을 통한 열손실이 줄어들어 100 nm Cr 대비 8.5배의 강한 초음파를 얻을 수 있었다.
Abstract
We have fabricated an optoacoustic ultrasound generator based on nanostructured germanium (Ge). Ge thin films were depositedvia e-beam evaporation and then etched using a metal-assisted chemical (MAC) method to form nanostructured Ge films. Themeasured intensity of ultrasound from the nanostructured Ge covered with PDMS was about 3 times stronger than that of100-nm-thick chromium (Cr). When the nanostructured Ge was embedded in the PDMS, the intensity of ultrasound became 8.5times as strong compared to the 100-nm-thick Cr.
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