TiZrN 박막의 조성이 구조적 특성 및 열적 특성에 미치는 영향
Effect of composition on the structural and thermal properties of TiZrN thin film
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화학적 조성이 TiZrN 박막의 구조적 특성 및 열적 특성에 미치는 영향을 조사하였다. 증착된 TixZr1-xN(x = 0.87,0.82, 0.7, 0.6, 0.28) 박막에서 Zr 분율이 증가함에 따라 결정립 크기가 감소하고 주상 구조에서 입계상 구조로 점진적으로 변화하는 미세구조 변화가 관찰되었다. 또한 XRD 분석을 통해 Zr 분율이 0.4까지 증가할 때 TiN 상에서 TiZrN 상으로의 점진적인 결정상 전이가 일어났음을 확인하였다. 900°C 온도에서의 열처리 이후 Ti0.82Zr0.18N과 Ti0.7Zr0.3N 박막은 rutile 상 TiO2와 TiZrO4 산화물이 공존하는 형태로 전환된 반면에 Ti0.6Zr0.4N 박막은 TiZrO4 산화물로 변화함을 확인하였다. 다섯 가지 조성의 TiZrN 박막 중에서 Ti0.6Zr0.4N 박막이 가장 우수한 고온 안정성을 나타내었고, Inconel 617 기판의 열산화에 의해 발생하는 Cr의 표면 확산을 억제하는 열산화 저항성 향상 효과가 가장 우수함을 확인하였다.
Abstract
The effect of chemical composition on the structural and thermal properties of TiZrN thin films was studied. As the Zr fraction in the deposited TixZr1-xN (x = 0.87, 0.82, 0.7, 0.6, and 0.28) increased, microstructural changes consisted of reduction in the grain size and a gradual transition from columnar structure to granular structure were observed. In addition,it was also confirmed that a gradual crystal phase transition from TiN to TiZrN has occurred as the Zr fraction increased up to 0.4. After heat treatment a t 900°C, Ti0.82Zr0.18N and Ti0.7Zr0.3N layers were converted to a form in which rutile phase TiO2 and TiZrO4 oxides coexist, while Ti0.6Zr0.4N layer was converted to TiZrO4 oxide. Among the five compositions of TiZrN films, the Ti0.6Zr0.4N showed the best high temperature stability and produced a significant enhancement in the thermal oxidation resistance of Inconel 617 through suppressing the surface diffusion of Cr caused by thermal oxidation of the Inconel 617 substrate.
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