반도체 AMC 모니터링용 샘플링 테스트 모듈에 관한 연구
A Study on Sampling Test Module for Semiconductor AMC Monitoring
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초록
The sampling test module of the existing AMC Monitoring System is constructed using tubes and fittings, so there has been a problem with molecular contaminants remaining in the system. This study demonstrated how a new manifold-type sampling test module without connecting tubes and fittings, and with super-hydrophobic coating improves residual molecular contaminants in the AMC Monitoring System through CDA purge when molecular contamination occurs in a clean room with a Semiconductor Fabrication.
Abstract
The sampling test module of the existing AMC Monitoring System is constructed using tubes and fittings, so there has been a problem with molecular contaminants remaining in the system. This study demonstrated how a new manifold-type sampling test module without connecting tubes and fittings, and with super-hydrophobic coating improves residual molecular contaminants in the AMC Monitoring System through CDA purge when molecular contamination occurs in a clean room with a Semiconductor Fabrication.
참고문헌 (6)
- Choi, J. H, "AMC(Airborne Molecular Contamination) Contamination Source and Control System in the Outside Air that Affects Semiconductor Processes", Air Cleaning Technology, 14(2), pp.66~78 (2001)
- Sung, W. D., "The Effects of Molecular Chemical Contamination on the Photolithography Process in Semiconductor Production", Doctor, pp.2004
- Kim, K. Y, "Information of Contamination in Semiconductor Cleanroom", Journal of the Korean Society of Precision Engineering, 19(8), pp.7~15 (2002)
- The development of ultra low concentration monitoring technologies for the airborne molecular contamination and total monitoring control system, "Kim, K. Y", Ministry of Science and Technology, ~ (2003)
- Jo, H. N, "An Intelligent Monitoring Framework to Recognize Airborne Molecular Contamination in Semiconductor Manufacturing Cleanroom", The Korean Society of Analytical Sciences, 2022(11), pp.36~ (2022)