Modification of conventional X-ray diffractometer for the measurement of phase distribution in a narrow region

Abstract

An X-ray diffractometer for spatially resolved X-ray difraction measurements was developed tomicro-XRD was composed of an X-ray microbeam alignment system and a sample micro translation systeminstead of a normal slit and a fixed sample stage in a commercial XRD. The X-ray microbeam alignment systemwas fabricated with a microbeam concentrator having two Ni deposited mirrors, a vertical positioner, and atilt table for the generation of a concentrated microbeam. The sample micro translation system was made witha sample holder and a horizontal translator, allowing movement of a specimen at 5 m steps. The angularintensity profile of the microbeam generated through a concentrator was symetric and not distorted. The sizeof the microbeam was 4,0×20 m and the spatial resolution of the beam was 47 m at the sample position.When the diffraction peaks were measured for a UO2 θ= ± 0.01o) of the peaks was as good as a conventional X-ray diffractometer. For the cross section of oxidizedtitanium metal, not only TiO2 in an outer layer but also TiO near an oxide-metal interface was observed.