The array growth of ferroelectric nanotubes in anodic porous alumina nanoholes on silicon
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A highly self-ordered hexagonal array of cylindrical pores has been fabricated by anodizing a thin film of Al on Si substrate and subsequent growth of PbZrTiO3(PZT) in these nanoholes has been performed sol-gel solution infiltration method. The diameter and the aspect ratio of vertically aligned AAO nanopores are about 40 nm and 9:1, respectively. The ferroelectric properties of PZT nanotubes were observed by an electrostatic force microscope (EFM). These nanotubes should provide promising materials for fundamental investigations on nanoscale ferroelectricity, and be useful in ferroelectric nanostorage media.
Abstract
A highly self-ordered hexagonal array of cylindrical pores has been fabricated by anodizing a thin film of Al on Si substrate and subsequent growth of PbZrTiO3(PZT) in these nanoholes has been performed sol-gel solution infiltration method. The diameter and the aspect ratio of vertically aligned AAO nanopores are about 40 nm and 9:1, respectively. The ferroelectric properties of PZT nanotubes were observed by an electrostatic force microscope (EFM). These nanotubes should provide promising materials for fundamental investigations on nanoscale ferroelectricity, and be useful in ferroelectric nanostorage media.