Structural and electrochemical properties of anodic aluminum oxide based electrolyte-insulator-metal device according to the heat treatment
1
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
In this study, we fabricated the electrolyte-insulator-metal sensor on the base of Si3N4 film-coated AAO template with variationof the heat treatment time. The structural and electrochemical properties of AAO sensor were investigated for applicationsin chemical sensors. Si3N4 layer was uniformly coated with the thickness of about 10 nm. Alumina layer, heat-treated for 10h, crystallized from the amorphous phase to crystalline phase of γ-Al2O3, and the spacing of lattice plane of the oxide layerwas about 2.638 Å. The AAO sensor heat-treated for 10 h showed the good normalized C-V properties, and the set values ofthe capacitance and the pH sensitivity were −0.3 V and 54.1 mV/pH, respectively
Abstract
In this study, we fabricated the electrolyte-insulator-metal sensor on the base of Si3N4 film-coated AAO template with variationof the heat treatment time. The structural and electrochemical properties of AAO sensor were investigated for applicationsin chemical sensors. Si3N4 layer was uniformly coated with the thickness of about 10 nm. Alumina layer, heat-treated for 10h, crystallized from the amorphous phase to crystalline phase of γ-Al2O3, and the spacing of lattice plane of the oxide layerwas about 2.638 Å. The AAO sensor heat-treated for 10 h showed the good normalized C-V properties, and the set values ofthe capacitance and the pH sensitivity were −0.3 V and 54.1 mV/pH, respectively
참고문헌 (17)
- H. Masuda, "Fabrication of gold nano dot array using anodic porous alumina as an evaporation mask", Jpn. J. Appl. Phys, 35, pp.L126~L129 (1996)
- H. Masuda, "Highly ordered nanochannel-array architecture in anodic alumina. Appl", Phys. Lett, 71, pp.2770~2772 (1997)
- E. Moyen, "Novel anodic aluminum oxide-based nanofabrication: applications in physics and biology", Surf. Interface Anal, 42, pp.1556~1560 (2010)
- H. Masuda, "Self-ordering of cell arrangement of anodic porous alumina formed in sulfuric acid solution", J. Electrochem. Soc, 144, pp.L127~L130 (1997)
- S. Z. Chu, "Fabrication of ideally ordered nanoporous alumina films and integrated alumina nanotubule arrays by high-field anodization", Adv. Mater, 17, pp.2115~2119 (2005)
- M. A. Kashi, "Fabrication of self-ordered nanoporous alumina with 69-115 nm interpore distances in sulfuric", oxalic acid mixtures by hard anodization, 2010, pp.49, 015202~
- A. M. Md Jani, "Nanoporous anodic aluminium oxide: advances in surface engineering and emerging applications", Progress in Materials Science, 58, pp.636~704 (2013)
- S. Iijima, "Helical microtubules of graphitic carbon", Nature, 354, pp.56~58 (1991)
- C. Sunseri, "Porosity of anodic alumina membranes from electrochemical measurements", J. Solid State Electrochem, 10, pp.416~421 (2006)
- G. Hu, "Study on wet etching of AAO template", Appl. Phys. Res, 1, pp.78~82 (2009)
- B. H. van der Schoot, "ISFET based enzyme sensors", Biosensors, 3, pp.161~186 (1987)
- M. J. Schöning, "Capacitive microsensors for biochemical sensing based on porous silicon technology", Sensors and Actuators B, 64, pp.59~64 (2000)
- I. Chen, "Chemical kinetics and reaction mechanism of thermal decomposition of aluminum hydroxide and magnesium hydroxide at high temperature (973-1123 K)", Ind. Eng. Chem. Res, 28, pp.738~742 (1989)
- Cullity B., "Elements of X-ray Diffraction" (1978), Addison-Wesley
- C. C. Chen, "Post-treatment method of producing ordered array of anodic aluminium oxide using general purity commercial (99.7%) aluminium", Jap. J. Appl. Phys, 44, pp.1529~1533 (2005)
- J. Choi, , Ph. D, pp.2004
- M. Schoning, "A capacitive field-effect sensor for the direct determination of organophosphorus pesticides", Sensors and Actuators B, 91, pp.92~97 (2003)