초음파 분무법으로 제조한 a-Fe2O3막의 구조적 및 전기적 특성에 미치는 기판온도 효과
Effects of Substrate Temperature on Structural and Electrical Properties of a-Fe2O3 Films Prepared by Ultrasonic Spray Pyrolysis
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Abstract
a-Fe2O3 films were prepared by ultrasonic spray pyrolysis (USP) on SiO2 coated Si wafers using iron acetylacetonateas an iron precursor. The crystallographic properties and surface morphologies of the films were characterized by X-raydifraction (XRD) and scanning electron microscopy (SEM), respectively. X-ray photoelectron spectroscopy (XPS) wascarried out to determine the Fe oxidation states. In order to observe stability of the films to temperature, the resistancevariation of the films with an ambient temperature was measured. The effects of substrate temperature on the structuraland electrical properties of the a-Fe2O3 films were studied. The films were densified from the substrate temperature of350oC. The grain size of the films grown at 400oC was shown to be increased abruptly comparing with that of 350oC.The films showed a low resistance variation between the ambient temperature of 300oC and 350oC.
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