초음파분무법으로 제조한 ZnO : Er막의 UV 발광 특성
UV emission of ZnO : Er films prepared by ultrasonic spray pyrolysis
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Abstract
The films of Er-doped ZnO (ZnO:Er) were prepared onto MgO wafers by ultrasonic spray pyrolysis at 550oC. Theconcentration of Er in the deposition source varied from 0.5 wt% to 3.0 wt%. The crystalographic properties and surfacerespectively. The properties of photoluminescence (PL) for the films were investigated by dependence of PL spectra onthe Er concentration in the films. The films were grown as polycrystalline with a dominant direction of [002]. The grainsize of the films were reduced by Er-doping. Er-doping enhanced the ultraviolet emision of ZnO:Er films. The ZnO:Erfilms prepared with the deposition source of 2.0 wt% Er showed the strongest ultraviolet light emission peak among thefilms in this study.
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