진공상온분사 공정을 이용한 WO₃-CoWO₄ 기반 나노구조 세라믹 박막 증착 및 미세구조 특성
Deposition and Microstructural Characteristics of WO₃-CoWO₄-Based Nanostructured Ceramic Thin Films via Vacuum Kinetic Spraying
2
조회
0
다운로드
0
인용
0
참고문헌
초록
Abstract
In this study, ceramic thin films were fabricated via VKS(Vacuum Kinetic Spraying) deposition using recycled WC-Co hard metal scrap, and the feasibility of the process was investigated. Since direct deposition of WC through VKS methods is challenging, isothermal oxidation and mechanical pulverization were employed to produce feedstock powders suitable for VKS. The oxidized powders were deposited onto Si wafers, resulting in dense thin films containing nanocrystalline WO₃ and CoWO₄ phases. Analysis of the feedstock and thin film grain sizes indicated that the impacting particles underwent fragmentation during deposition, which contributed to the densification of the lamellar structure. Additionally, impact-induced amorphization of the silicon substrate was found to enhance interfacial adhesion between the film and substrate. Micro-indentation tests on porous surface regions further revealed that repeated particle impingement promoted densification of the deposited lamellar layers.