3상의 자계 검출을 위한 수직 Hall 센서의 제작
Fabrication of vertical Hall sensor for detecting three phases magnetic field
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Abstract
In this study, we have fabricated a three branches vertical Hall sensor for detecting three phases rotation informationsof miniaturized brushless motor. The sensor gives three position signals phase shifted by 120o, corresponding to the motordriving signals. The branch has one Hall output and one input each other. The central part acts as common driving input.Sensor has branch width of 150m and distance from central electrode to Hall electrode of 10m. The sensitivity ofsensor is 250 V/A. T at magnetic field of 0.1 T. It has also showed three sine waves of Hall voltages with 120o phaseover a 360o rotation. A packaged sensing part are 2× 2mm2 and has been succesfully tested on a motor rotation at asped up to 60,00 rpm.
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