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박막 리튬이온전도체를 이용한 전위차 CO2 가스센서

Potentiometric CO2 gas sensor based on the thin film electrolyte of Li+ ion conductor

박진성|송호근|최광표|노효섭
한국센서학회|2005.07|센서학회지 (Journal of Sensor Science and Technology)|제14권 제4호|pp. 258-264

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참고문헌

주제분류공학일반

초록

Abstract

Li+-ion conducting (LiPO) thin films with thickness of 0.3m, 0.65, 1.2 were deposited on AlO substrate at room temperature by thermal evaporation. They were sintered at 700C and 800C for 2 hours, respectively. Reference electrode and sensing electrode were printed on Au-electrode by silk printing method. The EMF and the EMF/dec were increased with increasing the electrolyte thickness and sintering temperature. The sample sintered at 800C was shown a good response and recovery characteristics more than those sintered at 700C. The Nernst's slop of 75 mV per decade was obtained at operating temperature of 500C.

참고문헌 (19)

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