양극반응으로 제조된 다공질 WO3 박막의 가스센서 특성
The gas sensing characteristic of the porous tungsten oxide thin films based on anodic reaction
0
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
In this paper, the gas responses of tungsten oxide films prepared by anodic reaction was discussed. Sensing electrodesand heating electrodes were patterned by photolithography method on quartz substrate. Porous tungsten oxide wasfabricated in electrolyte solutions of 5 % HF (HF:C₂H6OH:H₂O=3:2:20) by anodic reaction. The anodic reaction withmetal (platinum wire) as a cathode and the sensing device as an anode was conducted under the various reaction times(1-10 min) at 10 mA/cm² The surface structure and morphology of the fabricated sensor have been analysed by X-raydifraction (XRD) and field-emision scanning electron microscopy (FE-SEM). Al the peaks of XRD results were wellindexed to the pure phase patern. The average diameter of the porous tungsten oxide surface were ranged about 10 nm.The fabricaed sensor showed good sensitivity to 20 ppm toluene at operating temperature of 250oC.
Abstract
In this paper, the gas responses of tungsten oxide films prepared by anodic reaction was discussed. Sensing electrodesand heating electrodes were patterned by photolithography method on quartz substrate. Porous tungsten oxide wasfabricated in electrolyte solutions of 5 % HF (HF:C₂H6OH:H₂O=3:2:20) by anodic reaction. The anodic reaction withmetal (platinum wire) as a cathode and the sensing device as an anode was conducted under the various reaction times(1-10 min) at 10 mA/cm² The surface structure and morphology of the fabricated sensor have been analysed by X-raydifraction (XRD) and field-emision scanning electron microscopy (FE-SEM). Al the peaks of XRD results were wellindexed to the pure phase patern. The average diameter of the porous tungsten oxide surface were ranged about 10 nm.The fabricaed sensor showed good sensitivity to 20 ppm toluene at operating temperature of 250oC.
참고문헌 (6)
- 이대식, "NOx감지를 위한 WO3후막센서의 제조 및 감응특성", 석사, 전자공학과, pp.1996
- 정종현, "혈구여과를 위한 다공질 실리콘 마이크로 필터의 제작", 석사, 전자공학과, pp.2007
- 이상록, "나노구조 금속산화물을 이용한 CO 및 NOx 검지용 마이크로센서의 제작", 석사, 전자공 학과, pp.2005
- 송갑득, "박 막 Te를 이용한 NOX 가스센서의 제작 및 특성", 한 국센서학회 종합학술대회 논문집, pp.67~68 (2004), 제주, 한국
- 양종인, "N-형 WO3 계 가스센서의 전기적 특성", 센서학회지, 7(3), pp.188~190 (1998)
- 장동혁, "후막형 TiO2", WO3 소자의 탄화수소 계에 대한 감도 특성, 1996, pp.5(2), 21~27