정전 용량형 MEMS 공진기의 비이상적 주파수 응답 모델링
Modeling of non-ideal frequency response in capacitive MEMS resonator
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In this paper, modeling of the non-ideal frequency response, especially “notch-and-spike” magnitude phenomenon and phase lag distortion, are discussed. To characterize the non-ideal frequency response, a new electro-mechanical simulation model based on SPICE is proposed using the driving loop of the capacitive vibratory gyroscope. The parasitic components of the driving loop are found to be the major factors of non-ideal frequency response, and it is verified with the measurement results.
Abstract
In this paper, modeling of the non-ideal frequency response, especially “notch-and-spike” magnitude phenomenon and phase lag distortion, are discussed. To characterize the non-ideal frequency response, a new electro-mechanical simulation model based on SPICE is proposed using the driving loop of the capacitive vibratory gyroscope. The parasitic components of the driving loop are found to be the major factors of non-ideal frequency response, and it is verified with the measurement results.
참고문헌 (8)
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