수열합성법으로 제조된 Co3O4 분말을 사용한후막 가스센서의 CO 감지 특성
The CO sensing properties of thick film gas sensor using Co3O4powders prepared by hydrothermal reaction method
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CO sensing thick film gas sensors using Co3O4 powders prepared by hydrothermal reaction method, were fabricated, and their structural, electrical and CO gas sensing properties were investigated. The specific surface area of the Co3O4 powders obtained from BET analysis was about 79.0 m2/g. XRD and SEM results show that the thick films heat-treated at 500 oC for 30 min after screen printing had the preferred orientation of (311) direction and the crystalline size was calculated to 221 Å_. The maximum activation energy obtained from the temperature-resistance characteristics was 3.11 eV in the temperature range of 290 oC to 310 oC. The sensitivity to 1,000 ppm CO was about 150 %. The specific surface area, crystalline size, and maximum activation energy were increased significantly and the sensitivity for CO gas was improved largely.
Abstract
CO sensing thick film gas sensors using Co3O4 powders prepared by hydrothermal reaction method, were fabricated, and their structural, electrical and CO gas sensing properties were investigated. The specific surface area of the Co3O4 powders obtained from BET analysis was about 79.0 m2/g. XRD and SEM results show that the thick films heat-treated at 500 oC for 30 min after screen printing had the preferred orientation of (311) direction and the crystalline size was calculated to 221 Å_. The maximum activation energy obtained from the temperature-resistance characteristics was 3.11 eV in the temperature range of 290 oC to 310 oC. The sensitivity to 1,000 ppm CO was about 150 %. The specific surface area, crystalline size, and maximum activation energy were increased significantly and the sensitivity for CO gas was improved largely.
참고문헌 (13)
- S. D. Choi, "Co3O4-based iso-butane sensor operating at low temperatures", Sensors and Actuators B, 77, pp.330~333 (2000)
- 정진화, "저온동작용 Co3O4 부탄가스 감 지 소자(I)", 센서학회지, 5(6), pp.7~14 (1996)
- T. Seiyama, "A new detector for gaseous componentsusing semiconductive thin films", Anal. Chem, 34, pp.1502~1504 (1962)
- J.Watson, "The tin oxide gas sensor and its applications", Sensors and Actuators B, 5, pp.29~42 (1984)
- H.Tuller, "Review of electrical properties of metal oxides as applied to temperature and chemical sensing", Sensors and Actuators B, 4, pp.679~688 (1983)
- N. M. White, "Thick-film gas sensor:past,present and future", Meas. Sci. Technol, pp.1~20 (1997)
- G. Martinelli, "Thick-film gas sensor", Sensors and Actuators B, 23, pp.157~161 (1995)
- M.Prudenziati, "Thick-film technology", Sensors and Actuators A, 25, pp.241~246 (1991)
- J. Park, "Solvothermal synthesis and gas-sensing performance of Co3O4 hollow nanospheres", Sensors and Actuators B, 136, pp.494~498 (2009)
- P.T.Moseley, "Thick film semiconductor gas sensor in Thick Film Sensors", pp.289~ (1994), M. Prudenziati Elsevier
- S. W. Lee, "Comparison study of SnO2 thin and thick film gas sensors", Sensors and Actuators B, 67, pp.122~127 (2000)
- G. Zhang, "Effect of particle size and dopant on properties of SnO2-based gas sensors", Sensors and Actuators B, 69, pp.144~152 (2000)
- 조철형, "Cr2O3 후막의 암모니아 가스 감지 특성", 센서학회지, 13(6), pp.424~429 (2004), 한국센서학회