수열합성법으로 제조된 Co_3O_4 분말을 사용한 후막 가스센서의 가스감지 특성
The Gas Sensing Properties of Thick Film Gas Sensor Using Co_3O_4 Powder Prepared by Hydrothermal Reaction Method
0
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
Co_3O_4 thick film gas sensor using the powder prepared by hydrothermal reaction method(HRM) was fabricated. For comparison study, we also prepared the sensor using commercial Co_3O_4 powder under the same fabrication conditions. Sensitivity, time response, and selectivity of them to variable gases such as iso-C_4H_(10), CO, NH_3, and CH_4 were investigated. The sensor from the powder prepared by HRM showed higher sensitivity to every gas than those from commercial powder. For iso-C_4H_(10) gas, the sensitivities of both sensor to 100 ppm are 160 % and 40 %, respectively. Time response and selectivity of the sensor using the powder prepared by HRM were better than those of the sensor using commercial powder.
Abstract
Co_3O_4 thick film gas sensor using the powder prepared by hydrothermal reaction method(HRM) was fabricated. For comparison study, we also prepared the sensor using commercial Co_3O_4 powder under the same fabrication conditions. Sensitivity, time response, and selectivity of them to variable gases such as iso-C_4H_(10), CO, NH_3, and CH_4 were investigated. The sensor from the powder prepared by HRM showed higher sensitivity to every gas than those from commercial powder. For iso-C_4H_(10) gas, the sensitivities of both sensor to 100 ppm are 160 % and 40 %, respectively. Time response and selectivity of the sensor using the powder prepared by HRM were better than those of the sensor using commercial powder.
참고문헌 (12)
- M. J. Madou, "Chemical sensing with solid state devices", pp.479~482 (1989), Academic Press Inc
- K. Ihokura, "The stannic oxide gas sensor", pp.1~6 (1994), CRC press Inc
- K. Ihokura, "The stannic oxide gas sensor", pp.49~127 (1994), CRC press Inc
- S. W. Lee, "Comparison study of SnO2 thin-and thick film gas sensors", Sensors and Actuators B, 67, pp.122~127 (2000)
- T. Minami, "Group impurity doped zinc oxide thin films prepared RF magnetron sputtering", Jpn. J. Appl. Phys, 24(10), pp.781~784 (1985)
- Wan-Young Chung, "Gas sensing properties of In2O3 thin film prepared by spin-coating method", J. Kor. Sensors Soc, 7(2), pp.117~1234 (1998)
- Soon-Don Choi, "Co3O4-based isobutane sensor operating at low temperatures", Sensors and Actuators B, 77, pp.330~334 (2001)
- 조창용, "금속산화물을 첨가한 Co3O4 후막의 가스 감지특성", 센서학회지, 18(1), pp.54~62 (2009), 한국센서학회
- 왕과시우, "Solvothermal synthesis and gas-sensing performance of Co3O4 hollow nanospheres", SENSORS AND ACTUATORS B-CHEMICAL, 136(2), pp.494~498, ELSEVIER SCIENCE SA
- G. Martinelli, "Thick-film gas sensor", Sensors and Actuators B, 23, pp.157~161 (1995)
- M.Prudenziati, "Thick-film technology", Sensors and Actuators A, 25, pp.241~246 (1991)
- 김광희, "수열합성법으로 제조된 Co3O4 분말을 사용한후막 가스센서의 CO 감지 특성", 센서학회지, 19(5), pp.385~390 (2010), 한국센서학회