MEMS 기술 기반 이식형 청각 장치용 전자기 엑츄에이터의 소형화 및 최적화
Miniaturization and Optimization of Electromagnetic Actuators for Implantable Hearing Device Based on MEMS Technology
2
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
A micro electromagnetic actuator with high vibration efficiency is proposed for use in an implantable hearing device. The actuator, which can be implanted in the middle ear, consists of membranes based on the stainless steel 304 (SUS-304), and other components. In conventional actuators, in which a thick membrane and a silicone elastomer are used, the size reduction was difficult. In order to min- iaturize the size of the actuator, it is necessary to reduce the size of the actuation potion that generates the driving force, resulting inreduction of the electromagnetic force. In this paper, the electromagnetic actuator is further miniaturized by the metal membrane andthe vibration amplitude is also optimized. The actuator designed according to the simulation results was fabricated by using micro-elec-tro-mechanical systems (MEMS) technology. In particular, a 20 µm thick metal membrane was fabricated using the erosion process, which reduced the length of the actuator by more than 400 µm. In the experiments, the vibration displacement characteristics of the opti- mized actuator were above 400 nm within the range of 0.1 to 1 kHz when a current of 1 mArms was applied to the coil.
Abstract
A micro electromagnetic actuator with high vibration efficiency is proposed for use in an implantable hearing device. The actuator, which can be implanted in the middle ear, consists of membranes based on the stainless steel 304 (SUS-304), and other components. In conventional actuators, in which a thick membrane and a silicone elastomer are used, the size reduction was difficult. In order to min- iaturize the size of the actuator, it is necessary to reduce the size of the actuation potion that generates the driving force, resulting inreduction of the electromagnetic force. In this paper, the electromagnetic actuator is further miniaturized by the metal membrane andthe vibration amplitude is also optimized. The actuator designed according to the simulation results was fabricated by using micro-elec-tro-mechanical systems (MEMS) technology. In particular, a 20 µm thick metal membrane was fabricated using the erosion process, which reduced the length of the actuator by more than 400 µm. In the experiments, the vibration displacement characteristics of the opti- mized actuator were above 400 nm within the range of 0.1 to 1 kHz when a current of 1 mArms was applied to the coil.
참고문헌 (12)
- R. Good, "The history and development of the implantable hearing aid", The Otolaryngologic Clinics of North America, 28(1), pp.1~6 (1995)
- W. H. Ko, "Engineering principles of mechanical stimulation of the middle ear", The Otolaryngologic Clinics of North America, 28(1), pp.29~41 (1995)
- B. S. Song, "Design of a differential electromagnetic transducer for use in IME system", Int. J. IEICE Trans. INF. & SYST, E87-D(5), pp.1231~1237 (2004)
- 김민우, "전기 모델에 의한 완전 이식형 인공중이용 차동 전자 트랜스듀서의 진동 특성 해석", 센서학회지, 16(3), pp.165~173 (2007), 한국센서학회
- S. K. Park, "Design and analysis of a microelectromagnetic vibration transducer used as an implantable middle ear hearing aid", J. Micromech. Microeng., 12, pp.505~511 (2002)[DOI]
- S. K. Park, "Microvibration transducer using silicon elastic body for an implantable middle ear hearing aid", Mechatronics, 12, pp.1173~1184 (2002)[DOI]
- M. K. Kim, "Design of a differential electromagnetic transducer for implantable middle ear hearing device using finite element method", Sens. Actuators A-Phys., 130-131, pp.234~240 (2006)[DOI]
- M. K. Kim, "Fabrication and optimal design of differential electromagnetic transducer for implantable middle ear hearing device", Biosensors & Bioelectronics, 21, pp.2170~2175 (2006)[DOI]
- 이창우, "이식형 인공중이를 위한 압전 플로팅 매스 트랜스듀서의 제안", 센서학회지, 14(5), pp.322~330 (2005), 한국센서학회
- T. G. Dietz, "Partially implantable vibration ossicular prosthesis", Proceeding of the Transducers' 97, pp.433~436 (1997)
- "ASTM F2504-05(2014), Standard Practice for Describing System Output of Implantable Middle Ear Hearing Device", ~ (2014)
- "ASTM F755-99(2011), Standard Specification for Selection of Porous Polyethylene for Use in Surgical Implants", ~ (2011)