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단일 a-InGaZnO 박막 트랜지스터를 이용한 정전용량 터치 화소 센서 회로

Capacitive Touch Sensor Pixel Circuit with Single a-InGaZnO Thin Film Transistor

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초록

The a-InGaZnO (a-IGZO) thin film transistor (TFT) has the advantages of larger mobility than that of amorphous silicon TFTs, acceptable reliability and uniformity over a large area, and low process cost. A capacitive-type touch sensor was studied with an a-IGZO TFT that can be used on the front side of a display due to its transparency. A capacitive sensor detects changes of capacitance between the surface of the finger and the sensor electrode. The capacitance varies according to the distance between the sensor plate and the touching or non-touching of the sensing electrode. A capacitive touch sensor using only one a-IGZO TFT was developed with the reduction of two bus lines, which made it easy to reduce the pixel pitch. The proposed sensor circuit maintained the amplification performance, which was investigated for various drive conditions.

Abstract

The a-InGaZnO (a-IGZO) thin film transistor (TFT) has the advantages of larger mobility than that of amorphous silicon TFTs, acceptable reliability and uniformity over a large area, and low process cost. A capacitive-type touch sensor was studied with an a-IGZO TFT that can be used on the front side of a display due to its transparency. A capacitive sensor detects changes of capacitance between the surface of the finger and the sensor electrode. The capacitance varies according to the distance between the sensor plate and the touching or non-touching of the sensing electrode. A capacitive touch sensor using only one a-IGZO TFT was developed with the reduction of two bus lines, which made it easy to reduce the pixel pitch. The proposed sensor circuit maintained the amplification performance, which was investigated for various drive conditions.

참고문헌 (11)

  1. Y. H. Tai, "Active matrix touch sensor detecting time-constant change implemented by dual-gate IGZO TFTs", Solid-State Electron, 72, pp.67~72 (2012)
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  4. Y. Chen, "63-3 : Capacitive touch sen-sor using a-IGZO TFTs for flexible AMOLED", SID Symp. Dig. Tech. Pap., 48(1), pp.934~937 (2017)
  5. Y. Chen, "Integrated active-matrix capacitive sensor using a-IGZO TFTs for AMOLED", IEEE J. Electron Devices Soc., 6, pp.214~218 (2018)
  6. T. Osada, "Development of liquid crystal display panel integrated with drivers using amorphous In–Ga–Zn-Oxide thin film transistors", Jpn. J. Appl. Phys., 49(3), pp.03CC02(1)~03CC02(4) (2010)
  7. 탁영준, "Reduction of activation temperature at 150°C for IGZO films with improved electrical performance via UV-thermal treatment", Journal of Information Display, 17(2), pp.73~78 (2016), 한국정보디스플레이학회
  8. P. Coni, "31. 2 : Eliminating ghost touches on a self-capacitive touchscreen", SID Symp. Dig. Tech. Pap., 43(1), pp.441~414 (2012)
  9. C. Luo, "A low power self-capacitive touch sensing analog front end with sparse multi-touch detection", 2014 IEEE Int. Conf. on Acoust. Speech Signal Process. (ICASSP), pp.3007~3011 (2014)
  10. Imagis technology, "A calibration method for increasing the touch of a capacitive touch sensor sensitivity of the self capacitance", KR Patent 101620830B1, ~ (2015)
  11. Y. Chen, "High-speed pseudo-CMOS circuits using bulk accumulation a-IGZO TFTs", IEEE Electron Device Lett., 36(2), pp.153~155 (2015)

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