전사 인쇄에 의한 3차원 백금 다공성 다층구조
Three-dimensional and Multilayered Structure Prepared by Area of Platinum Transfer Printing
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A three-dimensional porous structure was fabricated by pattern transfer printing for applications of electrodes in gas sensors. To form replica patterns, solutions were mixed with acetone, toluene, heptane, and poly(methyl methacrylate). These replica patterns can also be formed on substrates such as polyimide, polydimethylsiloxane, and silicon. The wide range of line widths from 1 to 5 µm was derived from the surface grating patterns of master substrates. The cross-bar pattern with 40 layers showed a thickness of 600 nm. The area of platinum transferred patterns with different line widths was enhanced to 20 × 25 mm, which is applicable to various electrode patterns of gas sensors.
Abstract
A three-dimensional porous structure was fabricated by pattern transfer printing for applications of electrodes in gas sensors. To form replica patterns, solutions were mixed with acetone, toluene, heptane, and poly(methyl methacrylate). These replica patterns can also be formed on substrates such as polyimide, polydimethylsiloxane, and silicon. The wide range of line widths from 1 to 5 µm was derived from the surface grating patterns of master substrates. The cross-bar pattern with 40 layers showed a thickness of 600 nm. The area of platinum transferred patterns with different line widths was enhanced to 20 × 25 mm, which is applicable to various electrode patterns of gas sensors.
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