다이어프램형 압력센서에서 주변 온도에 의한 오차 보상
Error Compensation due to Environmental Temperature for Diaphragm-Type Pressure Sensor
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초록
Pressure sensors are used in various industries such as automobiles, airplanes, medical equipment, and coolers. Even if the ambient temperature changes, the measurement is reliable and stable. In this study a diaphragm-type pressure sensor was used to derive a temperature-compensated pressure estimation equation for accurate pressure measurement at 100 oC and -40 oC. To understand the characteristics of the pressure sensor diaphragm with respect to temperature and pressure, experiments were conducted in temperaturevariable chamber using FEM analysis to confirm that the influence of temperature effect was nonlinear. Based on the experimental results, a nonlinear method for calculating the pressure by compensating for the error due to temperature was derived. The calculated pressure value is lower than 0.5 % at low and high temperatures, and lower than 0.4 % at 22 oC, thereby eliminating the effect of temperature
Abstract
Pressure sensors are used in various industries such as automobiles, airplanes, medical equipment, and coolers. Even if the ambient temperature changes, the measurement is reliable and stable. In this study a diaphragm-type pressure sensor was used to derive a temperature-compensated pressure estimation equation for accurate pressure measurement at 100 oC and -40 oC. To understand the characteristics of the pressure sensor diaphragm with respect to temperature and pressure, experiments were conducted in temperaturevariable chamber using FEM analysis to confirm that the influence of temperature effect was nonlinear. Based on the experimental results, a nonlinear method for calculating the pressure by compensating for the error due to temperature was derived. The calculated pressure value is lower than 0.5 % at low and high temperatures, and lower than 0.4 % at 22 oC, thereby eliminating the effect of temperature
참고문헌 (16)
- I. Obieta, "Sputtered silicon thin film for piezoresistive pressure micro-sensors", Sens. Actuators A, 42(1-3), pp.685~688 (1994)
- Y. Suzuki, "CrOx Thin Film Pressure Sensor Prepared Directly on The Stainless Steel Diaphragm", Tech. Dig. 12th Sens. Symp, A3-5, pp.151~154 (1994)
- I. Ayerdi, "Characterization of Tantalum Oxynitride Thin-Films as Hightemperature Strain Gauges", Sens. Actuators A, 46(1-3), pp.218~221 (1995)
- K. Rajanna, "Thin-Film Pressure Transducer with Manganese Film as The Strain Gauge", Sens. Actuators A, 24(1), pp.35~39 (1990)
- 김재민, "과부하 방지용 마이크로머시닝 세라믹 박막형 압력센서의 제작과 그 특성", 센서학회지, 12(6), pp.1~204 (2003), 한국센서학회
- 김미목, "고온용 실리콘 압력센서 개발", 센서학회지, 13(3), pp.175~181 (2004), 한국센서학회
- B. K. Ju, "Formation of Silicon Diaphragm Using Silicon-Wafer Direct bonding", Electrochemical Etch-stopping and Its Application to Silicon pressure Sensor Fabrication, 1994, pp.3(3), 45~53
- M. Akbar, "Temperature compensation of piezoresistive pressure sensors", Sens. Actuators A, 33(3), pp.155~162 (1992)
- S. J. Park, "Comparison of Temperature Characteristics Between Single and Poly-crystalline Sillicon Pressure Sensor", Proc. 6th Conf. on Sens. Technol., 1995(11), pp.342~344 (1995)
- J. M. Kim, "The Improvement in Offset and Temperature Drift on Silicon Piezoresistive Pressure Sensor", J. Sens. Sci. Technol., 5(3), pp.17~24 (1996)
- 이서준, "온도보상형 압력센서의 제조공정에 관한 연구", 한국정밀공학회지, 34(10), pp.701~706 (2017), 한국정밀공학회
- H. D, Park, "Physical Sensors;A Design of Output Voltage Compensation Circuits for Bipolar Integrated Pressure Sensor", J. Sens. Sci. Technol., 7(5), pp.300~305 (1998)
- 김우정, "스테인레스 봉입형 반도체 압력센서의 제작 및 그 특성", 센서학회지, 11(3), pp.3~ (2002), 한국센서학회
- Y. Liu, "Simultaneous pressure and temperature measurement with polymer-coated fiber Bragg grating", Electron. Lett., 36(6), pp.564~566 (2000)
- C. Pramanick, "Temperature compensation of piezoresistive micro-machined porous silicon pressure sensor by ANN", Microelectron. Reliab., 46(2-4), pp.343~351 (2006)
- 윤대중, "PZT 구동기를 이용한 다이어프램 변형시험 장치 개발", 한국정밀공학회지, 34(12), pp.927~932 (2017), 한국정밀공학회