Effect of SAW-IDT Electrodes Composed of Aluminum-Nickel Composite Thin Films on the Acoustic Performance of SAW Devices
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Al-Ni thin films were fabricated using combinatorial sputtering system to realize highly sensitive surface acoustic wave (SAW)devices. The Al-Ni sample library was grown with various chemical compositions and electrical resistivities, which provided importantinformation for selecting the most suitable materials for SAW devices. As acoustic waves generated from piezoelectric materials are significantly affected by the resistivity and density of the interdigital transducer (IDT) electrodes, three types of Al-Ni thin films with different Al contents were fabricated. The thickness of the Al-Ni thin film used in the SAW-IDT electrode was fixed at 100 nm. As theAl content of the Al-Ni film decreased from 79.2 to 24.5 at%, the resistivity increased slightly from 4.8 to 5.8 × 10-5 Ω-cm, whereasthe calculated density increased significantly from 3.6 to 6.9 g/cm3. The SAW device composed of Al-Ni IDT electrodes resonated at71 MHz without frequency shifts; however, the selectivity of the resonant frequency and insertion loss deteriorated as the Al contentdecreased. When there is no significant difference in the electrical characteristics of the SAW-IDT electrodes, the performance of theSAW devices can be determined by the density of the IDT electrodes.
Abstract
Al-Ni thin films were fabricated using combinatorial sputtering system to realize highly sensitive surface acoustic wave (SAW)devices. The Al-Ni sample library was grown with various chemical compositions and electrical resistivities, which provided importantinformation for selecting the most suitable materials for SAW devices. As acoustic waves generated from piezoelectric materials are significantly affected by the resistivity and density of the interdigital transducer (IDT) electrodes, three types of Al-Ni thin films with different Al contents were fabricated. The thickness of the Al-Ni thin film used in the SAW-IDT electrode was fixed at 100 nm. As theAl content of the Al-Ni film decreased from 79.2 to 24.5 at%, the resistivity increased slightly from 4.8 to 5.8 × 10-5 Ω-cm, whereasthe calculated density increased significantly from 3.6 to 6.9 g/cm3. The SAW device composed of Al-Ni IDT electrodes resonated at71 MHz without frequency shifts; however, the selectivity of the resonant frequency and insertion loss deteriorated as the Al contentdecreased. When there is no significant difference in the electrical characteristics of the SAW-IDT electrodes, the performance of theSAW devices can be determined by the density of the IDT electrodes.
참고문헌 (16)
- L. Rayleigh, "On Waves Propagated along the Plane Surface of an Elastic Solid", Proc. of London Math. Soc., pp.4~11 (1885)
- R. M. White, "Direct piezoelectric coupling to surface elastic waves", Appl. Phys. Lett., 7(12), pp.314~316 (1965)
- Z. Jiang, "Research progresses in preparation methods and applications of zinc oxide nanoparticles", J. Alloys Compd., 956, pp.170316~ (2023)
- R. Augustine, "Surface Acoustic Wave Device with Reduced Insertion Loss by Electrospinning P(VDF–TrFE)", ZnO Nanocomposites, 2016, pp.8, 282~290
- R. Fachberger, "Applications of wireless SAW sensing in the steel industry", Procedia Eng., 5, pp.224~227 (2010)
- Y. Q. Fu, "Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications : a review", Sens. Actuator B Chem., 143(2), pp.606~619 (2010)
- Y. Q. Fu, "Microfluidics based on ZnO", nano-crystalline diamond surface acoustic wave devices, 2012, pp.6(2), 024105~
- J. K. Luo, "Integrated ZnO Film Based Acoustic Wave Microfluidics and Biosensors", Adv. Sci. Technol., 67, pp.49~58 (2011)
- Z. Guttenberg, "Planar chip device for PCR and hybridization with surface acoustic wave pump", Lab Chip., 5(3), pp.308~317 (2005)
- G. M. Whitesides, "The origins and the future of microfluidics", Nature, 442(7101), pp.368~373 (2006)
- P. Teng, "Recent progress of electrowetting for droplet manipulation : from wetting to superwetting systems", Mater. Chem. Front., 4(1), pp.140~154 (2020)
- D. L. Arruda, "Microelectrical sensors as emerging platforms for protein biomarker detection in point-of-care diagnostics", Expert Rev. Mol. Diagn., 9(7), pp.749~755 (2009)
- J. C. Park, "Bandgap engineering of Cu(In1-xGax)Se2 absorber layers fabricated using CuInSe2 and CuGaSe2 targets for one-step sputtering process", Opt. Mat. Express, 6(11), pp.3541~3549 (2016)
- P. Nagy, "Mapping the microstructure and the mechanical performance of a combinatorial Co–Cr–Cu–Fe–Ni–Zn high-entropy alloy thin film processed by magnetron sputtering technique", J. Mater. Res. Technol., 31, pp.47~61 (2024)
- R. C. Chanaud, "Effects of Geometry on The Resonance Frequency of Helmholtz Resonators", J. Sound Vib., 178(3), pp.337~348 (1994)
- J. D. N. Cheeke, "Fundamentals and Applications of Ultrasonic Waves", pp.1~480 (2002), CRC press