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Functional Materials Based Surface Acoustic Wave Sensors: A Mini Review

박경수|서민규|유시진|김회준|김나윤|금호현
한국센서학회|2024.11|센서학회지 (Journal of Sensor Science and Technology)|제33권 제6호|pp. 458-473|DOI http://dx.doi.org/10.46670/JSST.2024.33.6.458

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키워드

BiosensorPiezoelectricGas sensorChemical sensorSurface acoustic waveResonatorFunctional materialVOC sensors
주제분류공학일반

초록

Surface acoustic wave (SAW) sensors are widely recognized for their high sensitivity and reliability, which make them suitable fordiverse applications. However, they continue to face limitations in repeatability, detection limits, and effective use in extreme environmentsas well as in biosensing and industrial settings. A critical factor in enhancing the performance of SAW sensors lies not onlyin the selection of advanced sensing materials but also in the precise methods of material integration. Recent advancements have combinednanostructured materials, which improve the surface characteristics, with analyte-specific substances that strengthen interactions,resulting in heightened sensitivity and accuracy. This review categorizes recent SAW sensor studies based on their applications andmaterials and provides an extensive overview for researchers. Additionally, it highlights how integration techniques affect the uniformity,thickness, and stability of the sensing films, all of which are essential for high-performance sensors. This study aimed to serve as a valuableresource for the development of SAW sensors with high reliability and longevity under challenging conditions.

Abstract

Surface acoustic wave (SAW) sensors are widely recognized for their high sensitivity and reliability, which make them suitable fordiverse applications. However, they continue to face limitations in repeatability, detection limits, and effective use in extreme environmentsas well as in biosensing and industrial settings. A critical factor in enhancing the performance of SAW sensors lies not onlyin the selection of advanced sensing materials but also in the precise methods of material integration. Recent advancements have combinednanostructured materials, which improve the surface characteristics, with analyte-specific substances that strengthen interactions,resulting in heightened sensitivity and accuracy. This review categorizes recent SAW sensor studies based on their applications andmaterials and provides an extensive overview for researchers. Additionally, it highlights how integration techniques affect the uniformity,thickness, and stability of the sensing films, all of which are essential for high-performance sensors. This study aimed to serve as a valuableresource for the development of SAW sensors with high reliability and longevity under challenging conditions.

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