Development of a MEMS-based H2S sensor with a high detection performance and fast response time
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H2S is a toxic and harmful gas, even at concentrations as low as hundreds of parts per million; thus, developing an H2S sensor with excellent performance in terms of high response, good selectivity, and fast response time is important. In this study, an H2S sensor with a high response and fast response time, consisting of a sensing material (SnO2), an electrode, a temperature sensor, and a micro-heater, was developed using micro-electro-mechanical system technology. The developed H2S sensor with a micro-heater (circular type) has excellent H2S detection performance at low H2S concentrations (0–10 ppm), with quick response time (<16 s) and recovery time (<65 s). Therefore, we expect that the developed H2S sensor will be considered a promising candidate for protecting workers and the general population and for responding to tightened regulations.
Abstract
H2S is a toxic and harmful gas, even at concentrations as low as hundreds of parts per million; thus, developing an H2S sensor with excellent performance in terms of high response, good selectivity, and fast response time is important. In this study, an H2S sensor with a high response and fast response time, consisting of a sensing material (SnO2), an electrode, a temperature sensor, and a micro-heater, was developed using micro-electro-mechanical system technology. The developed H2S sensor with a micro-heater (circular type) has excellent H2S detection performance at low H2S concentrations (0–10 ppm), with quick response time (<16 s) and recovery time (<65 s). Therefore, we expect that the developed H2S sensor will be considered a promising candidate for protecting workers and the general population and for responding to tightened regulations.
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