MEMS/Nano-technologies for Smart Air Environmental Monitoring Sensors
1
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
The importance of air quality monitoring is rapidly increasing. Even though state-of-the-art air quality monitoring technologies such as mass spectrometry, gas chromatography, and optical measurement enable high-fidelity measurement of air pollutants, they cannot be widely used for portable or personalized platforms because of their high cost and complexity. Recently, personalized and localized environmental monitoring, rather than global and averaged environmental monitoring, has drawn greater attention with the advancement of mobile telecommunication technologies. Here, micro- and nano-technologies enable highly integrated and ultra-compact sensors to meet the needs of personalized environmental monitoring. In this paper, several examples of MEMS-based gas sensors for compact and personalized air quality monitoring are explained. Additionally, the principles and usage of functional nanomaterials are discussed for highly sensitive and selective gas sensors.
Abstract
The importance of air quality monitoring is rapidly increasing. Even though state-of-the-art air quality monitoring technologies such as mass spectrometry, gas chromatography, and optical measurement enable high-fidelity measurement of air pollutants, they cannot be widely used for portable or personalized platforms because of their high cost and complexity. Recently, personalized and localized environmental monitoring, rather than global and averaged environmental monitoring, has drawn greater attention with the advancement of mobile telecommunication technologies. Here, micro- and nano-technologies enable highly integrated and ultra-compact sensors to meet the needs of personalized environmental monitoring. In this paper, several examples of MEMS-based gas sensors for compact and personalized air quality monitoring are explained. Additionally, the principles and usage of functional nanomaterials are discussed for highly sensitive and selective gas sensors.
참고문헌 (14)
- T. Hizawa, "Fabrication of a two-dimensional pH image sensor using a charge transfer technique", Sensor. Actuat. B-Chem., 117, pp.509~ (2006)
- J. Fritz, "Translating biomolecular recognition into nanomechanics", Science, 299, pp.316~318 (2000)
- D. Lange, "Complementary metal oxide semiconductor cantilever arrays on a single chip : mass-sensitive detection of volatile organic compounds", Anal. Chem, 74, pp.3084~3095 (2002)
- G. Sehra, "Miniature taste sensing system based on dual SH-SAW sensor device : an electronic tongue", Sensor. Actuat. B-Chem, 103, pp.233~239 (2004)
- O. K. Varghese, "Ammonia detection using nanoporous alumina resistive and surface acoustic wave sensors", Sensor. Actuat. B-Chem, 94, pp.27~35 (2003)
- B. Guo, "A monolithic integrated 4x4 tin oxide gas sensor array with on-chip multiplexing and differential readout circuits", Solid State Electron, 51, pp.69~76 (2007)
- K. Yasuda, "Molecular sieve catalysts on microcalorimeter chips for selective chemical sensing", Micropor. Mesopor. Mat, 119, pp.356~359 (2009)
- E. Oh, "Highperformance NO2 gas sensor based on ZnO nanorod grown by ultrasonic irradiation", Sensor. Actuat. B-Chem, 141, pp.239~243 (2009)
- M. Tonezzer, "Size-dependent response of single-nanowire gas sensors", Sensor. Actuat. B-Chem, 163, pp.146~152 (2012)
- C. Jin, "Synthesis, structure, and gas-sensing properties of Pt-functionalized TiO2 nanowire Sensors", J. Nanosci. Nanotechno, 14, pp.5833~5838 (2014)
- G. D. Khuspe, "Fussy nanofibrous network of polyaniline(PANi)for NH3detection", Synthetic Met, 162, pp.1822~1827 (2012)
- K. H. An, "Enhanced sensitivity of a gas sensor incorporating singlewalled carbon nanotube-polypyrrole nanocomposites", Adv. Mater, 16, pp.1005~1009 (2004)
- H. Tai, "Fabrication and gas sensitivity of polyaniline–titanium dioxide nanocomposite thin film", Sensor. Actuat. B-Chem, 125, pp.644~650 (2007)
- Y. Wang, "Flexible gas sensors with assembled carbon nanotube thin films for DMMP vapor detection", Sensor. Actuat. B-Chem, 150, pp.708~714 (2010)